| Presentation | 2002/4/9 Laser-induced melting and crystallization dynamics of silicon thin films Mutsuko HATANO, Shinya YAMAGUCHI, Costas. P GRIGOROPOULOS, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The liquid-solid interface motion and the temperature history of thin Si films during excimer laser annealing are observed by in-situ experiments combining time-resolved (～1ns) electrical conductance, optical reflectivity/transmissivity, and thermal emission measurements. The temperature response, melt propagation and evolution of the recrystallization process are fundamentally different in the partial-melting and the complete-melting regimes. Lateral crystal growth is induced by spatial control of partial/complete melting. Growth length is limited by the triggering of spontaneous nucleation in supercooled liquid Si and lateral solidification velocity is measured to be about 7.0 m/s. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Laser annealing / Poly-Si thin film / Crystal growth / Melting-solidification |
| Paper # | OME2002-4 |
| Date of Issue |
| Conference Information | |
| Committee | OME |
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| Conference Date | 2002/4/9(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Laser-induced melting and crystallization dynamics of silicon thin films |
| Sub Title (in English) | |
| Keyword(1) | Laser annealing |
| Keyword(2) | Poly-Si thin film |
| Keyword(3) | Crystal growth |
| Keyword(4) | Melting-solidification |
| 1st Author's Name | Mutsuko HATANO |
| 1st Author's Affiliation | Hitachi, Ltd., Central Research Laboratory() |
| 2nd Author's Name | Shinya YAMAGUCHI |
| 2nd Author's Affiliation | Hitachi, Ltd., Central Research Laboratory |
| 3rd Author's Name | Costas. P GRIGOROPOULOS |
| 3rd Author's Affiliation | Department of Mechanical Engineering, University of California |
| Date | 2002/4/9 |
| Paper # | OME2002-4 |
| Volume (vol) | vol.102 |
| Number (no) | 8 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |