| Presentation | 2002/4/15 A study of 10 GHz range SAW filter with ZnO / diamond structure Daisuke OKAYASU, Tatsuya OMORI, Kenya HASHIMOTO, Masatsune YAMAGUCHI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Recently, surface acoustic waves(SAW) devices employing diamond films are paid much attention because of its extraordinary high velocities. This paper describes fabrication of SAW filters with ZnO/IDT/diamond structure operating in 10 GHz range. First, SAW propagation in the structure was investigated. Second, the device fabrication process was investigated. Very fine IDTs were fabricated on the diamond film by the use of the lift-off process in the combination with the electron-beam lithography. ZnO films was deposited by the target facing type of sputtering method with DC power source. The SAW response was clearly observed at 8.6 GHz. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SAW filter / ZnO / diamond / DC-TFTS method / EB photolithography / lift-off process |
| Paper # | US2002-1 |
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| Conference Information | |
| Committee | US |
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| Conference Date | 2002/4/15(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Ultrasonics (US) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A study of 10 GHz range SAW filter with ZnO / diamond structure |
| Sub Title (in English) | |
| Keyword(1) | SAW filter |
| Keyword(2) | ZnO |
| Keyword(3) | diamond |
| Keyword(4) | DC-TFTS method |
| Keyword(5) | EB photolithography |
| Keyword(6) | lift-off process |
| 1st Author's Name | Daisuke OKAYASU |
| 1st Author's Affiliation | Graduate School of Science and Technology, Chiba University() |
| 2nd Author's Name | Tatsuya OMORI |
| 2nd Author's Affiliation | Dept. Electronics and Mechanical Eng., Chiba University |
| 3rd Author's Name | Kenya HASHIMOTO |
| 3rd Author's Affiliation | Dept. Electronics and Mechanical Eng., Chiba University |
| 4th Author's Name | Masatsune YAMAGUCHI |
| 4th Author's Affiliation | Dept. Electronics and Mechanical Eng., Chiba University |
| Date | 2002/4/15 |
| Paper # | US2002-1 |
| Volume (vol) | vol.102 |
| Number (no) | 30 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |