Presentation 2002/4/10
Fabrication of CO Film by MOD Process on a LaAlO_3 Substrate and its Application to λ/4 CPW SIR BPFs
Atsushi SANADA, Masao KIMURA, Takashi YAMAMOTO, Ikuo AWAI,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) YBCO thin films were fabricated on (001)LaAlO_3 substrates by using the metalorganic deposition (MOD) method which has advantages of non-vacuum, low-cost, and large-scale production of superconducting films and their microwave surface resistances were measured. The YBCO films showed preferable superconducting characteristics under the critical temperature of 90.4K with a sharp transition range. A measured microwave surface impedance of 0.13mΩ(9.98GHz,30K) is comparable with that made by sophisticated vacuum processes. Compact λ/4 coplanar waveguide (CPW) stepped-impedance resonator (SIR) bandpass filters (BPFs) were fabricated on the YBCO films. A two-stage BPF of center frequency of 5.774GHz, bandwidth of 125MHz, and insertion loss of 1.08dB is demonstrated.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) YBCO thin film / Metalorganic deposition method / Coplanar waveguide / Stepped-impedance resonator / Bandpass filter
Paper # SCE2002-7
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Conference Information
Committee SCE
Conference Date 2002/4/10(1days)
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Registration To Superconductive Electronics (SCE)
Language ENG
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication of CO Film by MOD Process on a LaAlO_3 Substrate and its Application to λ/4 CPW SIR BPFs
Sub Title (in English)
Keyword(1) YBCO thin film
Keyword(2) Metalorganic deposition method
Keyword(3) Coplanar waveguide
Keyword(4) Stepped-impedance resonator
Keyword(5) Bandpass filter
1st Author's Name Atsushi SANADA
1st Author's Affiliation Faculty of Engineering, Yamaguchi University()
2nd Author's Name Masao KIMURA
2nd Author's Affiliation Faculty of Engineering, Yamaguchi University
3rd Author's Name Takashi YAMAMOTO
3rd Author's Affiliation Faculty of Engineering, Yamaguchi University
4th Author's Name Ikuo AWAI
4th Author's Affiliation Faculty of Engineering, Yamaguchi University
Date 2002/4/10
Paper # SCE2002-7
Volume (vol) vol.102
Number (no) 10
Page pp.pp.-
#Pages 6
Date of Issue