| Presentation | 2005/11/17 Development of high sensitive humidity sensor using very thin polyimide film Yuta KANAMORI, Eiji ITOH, Keiichi MIYAIRI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Polyimide has moisture absorption is applicable as a humidity sensor. In the case of single layered polyimide humidity sensor consisting of Au/Polyimide(700nm)/Au, sensor responded linearly to changes in relative humidity, and showed small temperature dependence. However, this type of sensor showed very high dielectric loss tangent when frequency is below 1kHz. This is probably because of ionic polarization or leakage current of injected charge from electrode. On the other hands, thin double layered polyimide sensor consisting of Ta/Ta_2O_5(50nm)/polyimide(50-200nm)/Au showed better linearly and high sensitive. Dielectric loss tangent was lower in addition. This sensor also exhibit small temperature dependence and responded more quickly than single layered, speed of response was 2 second. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Polyimide / Humidity sensor / Tantalum Oxide / Transit response / High sensitive |
| Paper # | OME2005-86 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2005/11/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of high sensitive humidity sensor using very thin polyimide film |
| Sub Title (in English) | |
| Keyword(1) | Polyimide |
| Keyword(2) | Humidity sensor |
| Keyword(3) | Tantalum Oxide |
| Keyword(4) | Transit response |
| Keyword(5) | High sensitive |
| 1st Author's Name | Yuta KANAMORI |
| 1st Author's Affiliation | Faculty of Engineering, Shinshu University() |
| 2nd Author's Name | Eiji ITOH |
| 2nd Author's Affiliation | Faculty of Engineering, Shinshu University |
| 3rd Author's Name | Keiichi MIYAIRI |
| 3rd Author's Affiliation | Faculty of Engineering, Shinshu University |
| Date | 2005/11/17 |
| Paper # | OME2005-86 |
| Volume (vol) | vol.105 |
| Number (no) | 425 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |