| Presentation | 2005-11-17 RF characteristics of a compact cantilever type MEMS switch Tamotsu Nishino, Masatake Hangai, Shinichi Izuo, Shinnosuke Soda, Yukihisa Yoshida, Moriyasu Miyazaki, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A compact RF-MEMS switch was developed by using micromachining process with plated gold and sacrificial material of nickel. We have already reported the measurement results. In this report, an equivalent circuit model is presented for the compact cantilever type MEMS switch, and the roles of components in the model are discussed. The extracted characteristics have good agreement with the measured results. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Micromachining / RF-MEMS / Switch |
| Paper # | ED2005-159,MW2005-114 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2005/11/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | RF characteristics of a compact cantilever type MEMS switch |
| Sub Title (in English) | |
| Keyword(1) | Micromachining |
| Keyword(2) | RF-MEMS |
| Keyword(3) | Switch |
| 1st Author's Name | Tamotsu Nishino |
| 1st Author's Affiliation | Mitsubishi Electric Co. Advanced Technology R&D Center() |
| 2nd Author's Name | Masatake Hangai |
| 2nd Author's Affiliation | Mitsubishi Electric Co. Advanced Technology R&D Center |
| 3rd Author's Name | Shinichi Izuo |
| 3rd Author's Affiliation | Mitsubishi Electric Co. Information Technology R&D Center |
| 4th Author's Name | Shinnosuke Soda |
| 4th Author's Affiliation | Mitsubishi Electric Co. Information Technology R&D Center |
| 5th Author's Name | Yukihisa Yoshida |
| 5th Author's Affiliation | Mitsubishi Electric Co. Information Technology R&D Center |
| 6th Author's Name | Moriyasu Miyazaki |
| 6th Author's Affiliation | Mitsubishi Electric Co. Advanced Technology R&D Center |
| Date | 2005-11-17 |
| Paper # | ED2005-159,MW2005-114 |
| Volume (vol) | vol.105 |
| Number (no) | 400 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |