Presentation | 2005/11/18 A Study on Source Location of Multiple Electrical Dischargein a Plasma Chamber Sunao TSUCHIDA, Shigeki OBOTE, Kenichi KAGOSHIMA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We propose a source location method of multiple electrical discharge in a plasma chamber. This method is based on a Direction Of Arrival (DOA) estimation with MUSIC (Multiple Signal Classification). A numerical simulation is carried out by FDTD (Finite Difference Time Domain) method. The simulation results show our proposed method can estimate a source location of multiple electrical discharge. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Plasma Chamber / Multiple electrical discharge / Source location / MUSIC / FDTD |
Paper # | SIS2005-56 |
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Committee | SIS |
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Conference Date | 2005/11/18(1days) |
Place (in Japanese) | (See Japanese page) |
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Registration To | Smart Info-Media Systems (SIS) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | A Study on Source Location of Multiple Electrical Dischargein a Plasma Chamber |
Sub Title (in English) | |
Keyword(1) | Plasma Chamber |
Keyword(2) | Multiple electrical discharge |
Keyword(3) | Source location |
Keyword(4) | MUSIC |
Keyword(5) | FDTD |
1st Author's Name | Sunao TSUCHIDA |
1st Author's Affiliation | Department of Media and Telecommunications Engineering, The College of Engineering, Ibaraki University() |
2nd Author's Name | Shigeki OBOTE |
2nd Author's Affiliation | Department of Media and Telecommunications Engineering, The College of Engineering, Ibaraki University |
3rd Author's Name | Kenichi KAGOSHIMA |
3rd Author's Affiliation | Department of Media and Telecommunications Engineering, The College of Engineering, Ibaraki University |
Date | 2005/11/18 |
Paper # | SIS2005-56 |
Volume (vol) | vol.105 |
Number (no) | 427 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |