Presentation 2005/11/18
A Study on Source Location of Multiple Electrical Dischargein a Plasma Chamber
Sunao TSUCHIDA, Shigeki OBOTE, Kenichi KAGOSHIMA,
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Abstract(in English) We propose a source location method of multiple electrical discharge in a plasma chamber. This method is based on a Direction Of Arrival (DOA) estimation with MUSIC (Multiple Signal Classification). A numerical simulation is carried out by FDTD (Finite Difference Time Domain) method. The simulation results show our proposed method can estimate a source location of multiple electrical discharge.
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Keyword(in English) Plasma Chamber / Multiple electrical discharge / Source location / MUSIC / FDTD
Paper # SIS2005-56
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Conference Date 2005/11/18(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) A Study on Source Location of Multiple Electrical Dischargein a Plasma Chamber
Sub Title (in English)
Keyword(1) Plasma Chamber
Keyword(2) Multiple electrical discharge
Keyword(3) Source location
Keyword(4) MUSIC
Keyword(5) FDTD
1st Author's Name Sunao TSUCHIDA
1st Author's Affiliation Department of Media and Telecommunications Engineering, The College of Engineering, Ibaraki University()
2nd Author's Name Shigeki OBOTE
2nd Author's Affiliation Department of Media and Telecommunications Engineering, The College of Engineering, Ibaraki University
3rd Author's Name Kenichi KAGOSHIMA
3rd Author's Affiliation Department of Media and Telecommunications Engineering, The College of Engineering, Ibaraki University
Date 2005/11/18
Paper # SIS2005-56
Volume (vol) vol.105
Number (no) 427
Page pp.pp.-
#Pages 6
Date of Issue