| Presentation | 2005-10-21 A cell library development methodology for character projection Makoto SUGIHARA, Taiga TAKATA, Kenta NAKAMURA, Ryoichi INANAMI, Hiroaki HAYASHI, Katsumi KISHIMOTO, Tetsuya HASEBE, Yukihiro KAWANO, Yusuke MATSUNAGA, Kazuaki MURAKAMI, Katsuya OKUMURA, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We propose a cell library development methodology for throughput enhancement of electron beam direct-write (EBDW) systems. First, an ILP (Integer Linear Programming)-based cell selection is proposed for EBDW systems in which both of the character projection (CP) and the variable shaped beam (VSB) methods are available, in order to minimize the number of electron beam (EB) shots, that is, time to fabricate chips. Secondly, the influence of cell directions on area and delay time of chips is examined. The examination helps to reduce the number of EB shots with a little deterioration of area and delay time because unnecessary directions of cells can be removed to increase the number of cells on a CP aperture mask. Finally, a case study is shown in which the numbers of EB shots are examined under several cases. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Character Projection / Cell Library / Electron Beam Direct-Write / Photomask |
| Paper # | SIP2005-128,ICD2005-147,IE2005-92 |
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| Conference Information | |
| Committee | SIP |
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| Conference Date | 2005/10/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Signal Processing (SIP) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A cell library development methodology for character projection |
| Sub Title (in English) | |
| Keyword(1) | Character Projection |
| Keyword(2) | Cell Library |
| Keyword(3) | Electron Beam Direct-Write |
| Keyword(4) | Photomask |
| 1st Author's Name | Makoto SUGIHARA |
| 1st Author's Affiliation | ISIT() |
| 2nd Author's Name | Taiga TAKATA |
| 2nd Author's Affiliation | / |
| 3rd Author's Name | Kenta NAKAMURA |
| 3rd Author's Affiliation | Konan Park Bldg. |
| 4th Author's Name | Ryoichi INANAMI |
| 4th Author's Affiliation | / Konan Park Bldg. |
| 5th Author's Name | Hiroaki HAYASHI |
| 5th Author's Affiliation | / Konan Park Bldg. |
| 6th Author's Name | Katsumi KISHIMOTO |
| 6th Author's Affiliation | / / |
| 7th Author's Name | Tetsuya HASEBE |
| 7th Author's Affiliation | |
| 8th Author's Name | Yukihiro KAWANO |
| 8th Author's Affiliation | |
| 9th Author's Name | Yusuke MATSUNAGA |
| 9th Author's Affiliation | |
| 10th Author's Name | Kazuaki MURAKAMI |
| 10th Author's Affiliation | |
| 11th Author's Name | Katsuya OKUMURA |
| 11th Author's Affiliation | |
| Date | 2005-10-21 |
| Paper # | SIP2005-128,ICD2005-147,IE2005-92 |
| Volume (vol) | vol.105 |
| Number (no) | 350 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |