Presentation 2005-10-20
A 2.0μm Pixel Pitch MOS Image Sensor with an Amorphous Si Film Color Filter
Masahiro KASANO, Yuuichi INABA, Mitsuyoshi MORI, Shigetaka KASUGA, Takahiko MURATA, Takumi YAMAGUCHI,
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Abstract(in English) We have developed a 2.0×2.0μm^2 pixel size MOS image sensor with a high aperture ratio of 30%. The key technologies are a newly developed pixel circuit configuration that shares an amplifying circuit among four pixels, a fine design rule of 0.15um and a thin color filter made up of amorphous silicon. In the new pixel circuit configuration, the unit pixel has 1.5 transistors. The design rule of 0.15μm enables reduction of wiring area by 40%. The newly developed color filter achieves a thickness of 1/10 of that of the conventional organic pigment color filter giving rise to high light collection efficiency.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) MOS image sensor / pixel configuration / driving method / color filter / amorphous silicon
Paper # SIP2005-105,ICD2005-124,IE2005-69
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Committee ICD
Conference Date 2005/10/13(1days)
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Registration To Integrated Circuits and Devices (ICD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) A 2.0μm Pixel Pitch MOS Image Sensor with an Amorphous Si Film Color Filter
Sub Title (in English)
Keyword(1) MOS image sensor
Keyword(2) pixel configuration
Keyword(3) driving method
Keyword(4) color filter
Keyword(5) amorphous silicon
1st Author's Name Masahiro KASANO
1st Author's Affiliation Semiconductor Devices Research Center, Semiconductor Company Matsushita Electric Industrial Co., Ltd()
2nd Author's Name Yuuichi INABA
2nd Author's Affiliation Semiconductor Devices Research Center, Semiconductor Company Matsushita Electric Industrial Co., Ltd
3rd Author's Name Mitsuyoshi MORI
3rd Author's Affiliation Semiconductor Devices Research Center, Semiconductor Company Matsushita Electric Industrial Co., Ltd
4th Author's Name Shigetaka KASUGA
4th Author's Affiliation Semiconductor Devices Research Center, Semiconductor Company Matsushita Electric Industrial Co., Ltd
5th Author's Name Takahiko MURATA
5th Author's Affiliation Semiconductor Devices Research Center, Semiconductor Company Matsushita Electric Industrial Co., Ltd
6th Author's Name Takumi YAMAGUCHI
6th Author's Affiliation Semiconductor Devices Research Center, Semiconductor Company Matsushita Electric Industrial Co., Ltd
Date 2005-10-20
Paper # SIP2005-105,ICD2005-124,IE2005-69
Volume (vol) vol.105
Number (no) 351
Page pp.pp.-
#Pages 5
Date of Issue