| Presentation | 2002/8/23 A study for cross-sectional device characterization in potential profiling by Kelvin probe force microscopy Michihiko SUHARA, Makoto SHIBAMIYA, Tsugunori OKUMURA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | By using Kelvin probe force microscopy (KFM), a cross-sectional profiling of contact potential difference of sample against Au-corated probe was carried out. Prior to the KFM observation, a force curve was measured to evaluate the probe-sampledistance. It is important to dependence of apparent potential value on the probe-sampledistance to evaluate the contact potential difference quantitively. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Kelvin probe force microscopy / Force curve / Contact potential difference / Probe-sample distance |
| Paper # | ED2002-197 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2002/8/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A study for cross-sectional device characterization in potential profiling by Kelvin probe force microscopy |
| Sub Title (in English) | |
| Keyword(1) | Kelvin probe force microscopy |
| Keyword(2) | Force curve |
| Keyword(3) | Contact potential difference |
| Keyword(4) | Probe-sample distance |
| 1st Author's Name | Michihiko SUHARA |
| 1st Author's Affiliation | Department of Electrical Engineering, Graduate School of Engineering, Tokyo Metropolitan University() |
| 2nd Author's Name | Makoto SHIBAMIYA |
| 2nd Author's Affiliation | Department of Electrical Engineering, Graduate School of Engineering, Tokyo Metropolitan University |
| 3rd Author's Name | Tsugunori OKUMURA |
| 3rd Author's Affiliation | Department of Electrical Engineering, Graduate School of Engineering, Tokyo Metropolitan University |
| Date | 2002/8/23 |
| Paper # | ED2002-197 |
| Volume (vol) | vol.102 |
| Number (no) | 294 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |