| Presentation | 2002/8/23 Electrical Characterization of Oxidated, Nitridated, and Oxi-Nitridated (100) GaAs K. Nakamura, N.C. Paul, M. Takebe, K. Iiyama, S. Takamiya, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Influence of oxidation by UV & Ozone process, nitridation by nitrogen plasma process, and nitridation after oxidation (oxi-nitridation) on the electrical performances of (100) GaAs surface were investigated by making metal/insulator/semiconductor (MIS) diodes and Schottky diodes after these treatments. The oxidation damages GaAs surface. Leakage current increased with the process period up to two hours and then decreased by longer time oxidation. The nitridation of bare GaAs wafers drastically increased leakage currents and deteriorated capacitance-voltage performances. The nitridation after 8-hours oxidation recovered the oxidation damage, decreased the leakage current up to 4-hours nitridation, and improved built in potential of the MIS diodes. These results coincide well with results of structural characterization which are reported in our separate paper. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | oxidation / nitridation / oxi-nitridation / I-V characteristic / C-V charactenstic |
| Paper # | ED2002-187 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2002/8/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Electrical Characterization of Oxidated, Nitridated, and Oxi-Nitridated (100) GaAs |
| Sub Title (in English) | |
| Keyword(1) | oxidation |
| Keyword(2) | nitridation |
| Keyword(3) | oxi-nitridation |
| Keyword(4) | I-V characteristic |
| Keyword(5) | C-V charactenstic |
| 1st Author's Name | K. Nakamura |
| 1st Author's Affiliation | Graduate School of Natural Science, Kanazawa University() |
| 2nd Author's Name | N.C. Paul |
| 2nd Author's Affiliation | Graduate School of Natural Science, Kanazawa University |
| 3rd Author's Name | M. Takebe |
| 3rd Author's Affiliation | Graduate School of Technology Faculty of Engineering, Kanazawa University |
| 4th Author's Name | K. Iiyama |
| 4th Author's Affiliation | Graduate School of Technology Faculty of Engineering, Kanazawa University |
| 5th Author's Name | S. Takamiya |
| 5th Author's Affiliation | Graduate School of Natural Science, Kanazawa University |
| Date | 2002/8/23 |
| Paper # | ED2002-187 |
| Volume (vol) | vol.102 |
| Number (no) | 294 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |