| Presentation | 1999/11/19 Backside Electron Beam Testing Method for Flip Chip Eiji Yoshida, Taichi Nakashima, Tohru Koyama, Junko Komori, Yoji Mashiko, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We propose a new technique for analyzing flip chip using backside electron beam (EB) testing method. We have developed new sample preparation method from the backside of the flip chip for the EB testing, and have succeeded to expose observation metal-lines in short time and at high location accuracy. As a result, for pseudo-failure we have acquired voltage contrast image and voltage waveform as same as the EB testing from front-side, and have confirmed that the backside EB testing method is useful for failure analysis of the flip chip. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Electron Beam Testing / Backside Analysis / Flip Chip / Fault Dictionary / Dicing Saw / Focused Ion Beam |
| Paper # | R99-23 |
| Date of Issue |
| Conference Information | |
| Committee | R |
|---|---|
| Conference Date | 1999/11/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Reliability(R) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Backside Electron Beam Testing Method for Flip Chip |
| Sub Title (in English) | |
| Keyword(1) | Electron Beam Testing |
| Keyword(2) | Backside Analysis |
| Keyword(3) | Flip Chip |
| Keyword(4) | Fault Dictionary |
| Keyword(5) | Dicing Saw |
| Keyword(6) | Focused Ion Beam |
| 1st Author's Name | Eiji Yoshida |
| 1st Author's Affiliation | Mitsubishi Electric Corporation() |
| 2nd Author's Name | Taichi Nakashima |
| 2nd Author's Affiliation | Ryoden Semiconductor System Engineering Corp. |
| 3rd Author's Name | Tohru Koyama |
| 3rd Author's Affiliation | Mitsubishi Electric Corporation |
| 4th Author's Name | Junko Komori |
| 4th Author's Affiliation | Mitsubishi Electric Corporation |
| 5th Author's Name | Yoji Mashiko |
| 5th Author's Affiliation | Mitsubishi Electric Corporation |
| Date | 1999/11/19 |
| Paper # | R99-23 |
| Volume (vol) | vol.99 |
| Number (no) | 454 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |