Presentation 1999/12/13
Field-Emitter Image Sensor with HARP Target
Katsunori Osada, Masakazu Nanba, Toshio Yamagishi, Saburo Okazaki, Norifumi Egami, Kenkichi Tanioka, Katsumi Takayama, Mitsuru Tanaka, Shigeo Itoh,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) An image sensor is described that uses a field emitter array (FEA) and a high-gain avalanche rushing amorphous photoconductor (HARP). An experimental device was constructed of an FEA with 50×50 elements, a mesh electrode with an aperture ratio of about 50%, and a 2-μm-thick HARP target. The electrode and target were set facing one another. Investigation of the fundamental characteristics of this device in a vacuum chamber showed that it can pick up images satisfactorily. Using the HARP target resulted in high sensitivity, and the temporal fluctuation and spatial variation in the emission currents obtained from the FEA had almost no effect on the current of the output signal. Investigation of potential packaging structures and sealing methods showed that a glass-capsule-sealed structure, which was fabricated experimentally, is a promising one for practical applications.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) High Sensitivity / Image Sensor / Field-Emitter / HARP Target / Mesh Electrode
Paper # ED99-245
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Conference Information
Committee ED
Conference Date 1999/12/13(1days)
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Paper Information
Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Field-Emitter Image Sensor with HARP Target
Sub Title (in English)
Keyword(1) High Sensitivity
Keyword(2) Image Sensor
Keyword(3) Field-Emitter
Keyword(4) HARP Target
Keyword(5) Mesh Electrode
1st Author's Name Katsunori Osada
1st Author's Affiliation NHK Science and Technical Research Laboratories()
2nd Author's Name Masakazu Nanba
2nd Author's Affiliation NHK Science and Technical Research Laboratories
3rd Author's Name Toshio Yamagishi
3rd Author's Affiliation NHK Science and Technical Research Laboratories
4th Author's Name Saburo Okazaki
4th Author's Affiliation NHK Science and Technical Research Laboratories
5th Author's Name Norifumi Egami
5th Author's Affiliation NHK Science and Technical Research Laboratories
6th Author's Name Kenkichi Tanioka
6th Author's Affiliation NHK Science and Technical Research Laboratories
7th Author's Name Katsumi Takayama
7th Author's Affiliation Product and Development Center, Futaba Corporation
8th Author's Name Mitsuru Tanaka
8th Author's Affiliation Product and Development Center, Futaba Corporation
9th Author's Name Shigeo Itoh
9th Author's Affiliation Product and Development Center, Futaba Corporation
Date 1999/12/13
Paper # ED99-245
Volume (vol) vol.99
Number (no) 497
Page pp.pp.-
#Pages 6
Date of Issue