| Presentation | 1999/9/21 Structural Characterization of Inorganic and Organic Thin Films by Energy Dispersive Grazing Incidence X-ray Analysis K. Ishida, T. Horiuchi, K. Matsushige, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The characterization of surface and thin films is one of the important fields in the research and development of functional materials. Recently, we proposed an energy dispersive-grazing incidence x-ray analysis system for surface and thin film studies. In this system, the grazing incidence x-ray diffraction, fluorescence spectroscopy and reflectivity measurement can be carried out with a fixed 20 angle. To demonstrate it's capabilities for the structural and orientational characterization of thin films, inorganic and organic thin films evaporated on single crystals were investigated by this system. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Surface Diffraction / Total Reflection / Energy Dispersive / Epitaxial growth / polysilane |
| Paper # | ED99-185 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 1999/9/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Structural Characterization of Inorganic and Organic Thin Films by Energy Dispersive Grazing Incidence X-ray Analysis |
| Sub Title (in English) | |
| Keyword(1) | Surface Diffraction |
| Keyword(2) | Total Reflection |
| Keyword(3) | Energy Dispersive |
| Keyword(4) | Epitaxial growth |
| Keyword(5) | polysilane |
| 1st Author's Name | K. Ishida |
| 1st Author's Affiliation | Department of Electronic Science and Engineering, Graduate School of Engineering, Kyoto University() |
| 2nd Author's Name | T. Horiuchi |
| 2nd Author's Affiliation | Department of Electronic Science and Engineering, Graduate School of Engineering, Kyoto University |
| 3rd Author's Name | K. Matsushige |
| 3rd Author's Affiliation | Department of Electronic Science and Engineering, Graduate School of Engineering, Kyoto University |
| Date | 1999/9/21 |
| Paper # | ED99-185 |
| Volume (vol) | vol.99 |
| Number (no) | 318 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |