Presentation 1999/10/22
Characteristics of recessed gate AlGaN/GaN MODFETs on sapphire
Takashi EGAWA, Hiroyasu ISHIKAWA, Guang Yuan Zhao, Takashi JIMBO, Masayoshi UMENO,
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Abstract(in English) A recessed gate AlGaN/GaN modulation-doped field-effect transistor (MODFET) has been grown on a sapphire substrate by metalorganic chemical vapor deposition (MOCVD). Two-dimensional electron gas (2DEG) mobility and sheet carrier density of AlGaN/GaN heterostructure on sapphire were 740cm^2/V_<・s> and 5.1x10^<12>cm^<-2> at 300 K, and 12000cm^2/V_<・s> and 2.8x10^<12>cm^<-2> at 8.9K, respectively. The recessed gate device showed the maximum extrinsic transconductance 146mS/mm and drain-source current 900mA/mm for the AlGaN/GaN MODFET with a gate length of 2.1μm at 25℃. At an elevated temperature of 350℃, the maximum extrinsic transconductance and drain-source current were 62mS/mm and 347mA/mm, respectively. The AlGaN/GaN MODFET exhibited the stable operation with good pinch-off characteristics at high temperatures, and the very weak temperature dependence of the threshold voltage. The drain current collapse was not observed in the dark and AC measurement.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) AlGaN/GaN MODFET / 2DEG / high-temperature characteristic / current collapse
Paper # CPM99-118
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Committee CPM
Conference Date 1999/10/22(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Characteristics of recessed gate AlGaN/GaN MODFETs on sapphire
Sub Title (in English)
Keyword(1) AlGaN/GaN MODFET
Keyword(2) 2DEG
Keyword(3) high-temperature characteristic
Keyword(4) current collapse
1st Author's Name Takashi EGAWA
1st Author's Affiliation Research Center for Micro-Structure Devices, Nagoya Institute of Technology()
2nd Author's Name Hiroyasu ISHIKAWA
2nd Author's Affiliation Research Center for Micro-Structure Devices, Nagoya Institute of Technology
3rd Author's Name Guang Yuan Zhao
3rd Author's Affiliation Venture Business Laboratory, Nagoya Institute of Technology
4th Author's Name Takashi JIMBO
4th Author's Affiliation Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology
5th Author's Name Masayoshi UMENO
5th Author's Affiliation Research Center for Micro-Structure Devices, Nagoya Institute of Technology:Department of Electrical and Computer Engineering, Nagoya Institute of Technology
Date 1999/10/22
Paper # CPM99-118
Volume (vol) vol.99
Number (no) 379
Page pp.pp.-
#Pages 6
Date of Issue