Presentation 1999/10/22
The characteristics of Pd ohmic electrode on p-type GaN
K. TAKATANI, T. OHNO, S. ITO, S. OHMI, M. ISHIDA, T. OKUMURA, M. TANEYA,
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Abstract(in English) The electric characteristics and the aptitude in device use of Pd ohmic electrode for p-type GaN are reported. Because p-type GaN used for p-type contact of GaN light emitting devices has an extremely large work function and the Schottky barrier tends to be formed easily, it is difficult to lower sufficiently the specific contact resistance of the conventional Ni/Au electrode on p-type GaN. Pd electrode makes it possible to moderate the effect of Schottky barrier with its reactivity to GaN and to achieve the lower specific contact resistance than that of the Ni/Au electorode. Furthermore, this electrode is superior to Ni/Au electrode in elapse deterioration with current injection as well. Thus, we expect Pd as the promising ohmic electrode with low resistance for p-type GaN.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) p-type GaN / Ohmic electrode / Schottky barrier / specific contact resistance / Pd / elapse deterioration
Paper # CPM99-116
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Committee CPM
Conference Date 1999/10/22(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) The characteristics of Pd ohmic electrode on p-type GaN
Sub Title (in English)
Keyword(1) p-type GaN
Keyword(2) Ohmic electrode
Keyword(3) Schottky barrier
Keyword(4) specific contact resistance
Keyword(5) Pd
Keyword(6) elapse deterioration
1st Author's Name K. TAKATANI
1st Author's Affiliation Advanced Technology Research Laboratories, Corporate R&D Group, SHARP Corporation()
2nd Author's Name T. OHNO
2nd Author's Affiliation Advanced Technology Research Laboratories, Corporate R&D Group, SHARP Corporation
3rd Author's Name S. ITO
3rd Author's Affiliation Advanced Technology Research Laboratories, Corporate R&D Group, SHARP Corporation
4th Author's Name S. OHMI
4th Author's Affiliation Advanced Technology Research Laboratories, Corporate R&D Group, SHARP Corporation
5th Author's Name M. ISHIDA
5th Author's Affiliation Advanced Technology Research Laboratories, Corporate R&D Group, SHARP Corporation
6th Author's Name T. OKUMURA
6th Author's Affiliation Advanced Technology Research Laboratories, Corporate R&D Group, SHARP Corporation
7th Author's Name M. TANEYA
7th Author's Affiliation Advanced Technology Research Laboratories, Corporate R&D Group, SHARP Corporation
Date 1999/10/22
Paper # CPM99-116
Volume (vol) vol.99
Number (no) 379
Page pp.pp.-
#Pages 6
Date of Issue