| Presentation | 1999/10/22 Selective Area Growth and Epitaxial Lateral Overgrowth of GaN Kazumasa Hiramatsu, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | ELO GaN using W mask has been performed by low pressure MOVPE and atmospheric HVPE. For the growth by low pressure MOVPE, the W buried structure is successfully obtained by two step ELO technique. Crystal and optical properties of ELO GaN using W mask via HVPE have been characterized by X-ray diffraction and cathodoluminescence. The tilts of c-axis of ELO GaN using W mask is much smaller than that of ELO GaN using SiO_2 mask. Uniform bound excitonic emission is observed from ELO GaN using W mask. It is found that the quality of ELO GaN using W mask is much better than that of ELO GaN using SiO_2 mask. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | GaN / selective area growth / epitaxial lateral overgrowth(ELO) / tungsten / MOVPE / HVPE / CL |
| Paper # | CPM99-109 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 1999/10/22(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Selective Area Growth and Epitaxial Lateral Overgrowth of GaN |
| Sub Title (in English) | |
| Keyword(1) | GaN |
| Keyword(2) | selective area growth |
| Keyword(3) | epitaxial lateral overgrowth(ELO) |
| Keyword(4) | tungsten |
| Keyword(5) | MOVPE |
| Keyword(6) | HVPE |
| Keyword(7) | CL |
| 1st Author's Name | Kazumasa Hiramatsu |
| 1st Author's Affiliation | Department of Electrical and Electronic Engineering, Mie University() |
| Date | 1999/10/22 |
| Paper # | CPM99-109 |
| Volume (vol) | vol.99 |
| Number (no) | 379 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |