| Presentation | 2000/1/20 High Gain HJFET-MMIC Amplifiers for Millimeter-wave with 0.13 μm Embedded Gate Akio Wakejima, Yoichi Makino, Katsumi Yamanoguchi, Norihiko Samoto, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | High gain HJFET-MMICs with embedded gates in a SiO_2 film have been developed. A chemically amplified resist(CA resist)is employed as a dry-etching mask and SiO_2 openings, which determine gate length(Lg), are directly patterned by two-step dry-etching. Very small deviations both in Lg and threshold voltage are obtained. SiO_2 film thickness is optimized in order to reduce fringing gate capacitance. As a result, fabricated HJFETs(Lg=0.13 μm)exhibited high gain performance of 220 GHz f_ |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Millimeter-wave / HJFET / MMIC / Amplifier |
| Paper # | ED99-278,MW99-202,ICD99-253 |
| Date of Issue |
| Conference Information | |
| Committee | MW |
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| Conference Date | 2000/1/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Microwaves (MW) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | High Gain HJFET-MMIC Amplifiers for Millimeter-wave with 0.13 μm Embedded Gate |
| Sub Title (in English) | |
| Keyword(1) | Millimeter-wave |
| Keyword(2) | HJFET |
| Keyword(3) | MMIC |
| Keyword(4) | Amplifier |
| 1st Author's Name | Akio Wakejima |
| 1st Author's Affiliation | Kansai Electronics Research Laboratories, NEC Corporation() |
| 2nd Author's Name | Yoichi Makino |
| 2nd Author's Affiliation | Kansai Electronics Research Laboratories, NEC Corporation |
| 3rd Author's Name | Katsumi Yamanoguchi |
| 3rd Author's Affiliation | Kansai Electronics Research Laboratories, NEC Corporation |
| 4th Author's Name | Norihiko Samoto |
| 4th Author's Affiliation | Kansai Electronics Research Laboratories, NEC Corporation |
| Date | 2000/1/20 |
| Paper # | ED99-278,MW99-202,ICD99-253 |
| Volume (vol) | vol.99 |
| Number (no) | 557 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |