Presentation 2000/1/20
Millimeter-wave Flip-Chip IC with Built-in Low-Loss Filter on Silicon
Kazuuaki Takahashi, Suguru Fujita, Ushio Sangawa, Takeharu Urabe, Hiroshi Ogura, Hiroyuki Yabuki,
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Abstract(in English) A novel three-dimensional K-band receiver front-end IC was developed in which a micromachined low-loss filter and flip-chip devices were integrated on a silicon substrate. An inverted microstrip line is newly introduced in the filter, and a compact low loss RF filter was realized on a silicon substrate. Multi-layered BCB and flip-chip bonding technologies were also adopted. These technologies realize a highly compact high-performance millimeter-wave flip-chip IC(MFIC), with built-in low loss filer. A 25 GHz receiver front-end IC was demonstrated which was realized on a 11 mm by 11 mm silicon chip
Keyword(in Japanese) (See Japanese page)
Keyword(in English) micromachining / silicon / filter / BCB / flip-chip
Paper # ED99-277,MW99-201,ICD99-252
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Conference Date 2000/1/20(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
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Title (in English) Millimeter-wave Flip-Chip IC with Built-in Low-Loss Filter on Silicon
Sub Title (in English)
Keyword(1) micromachining
Keyword(2) silicon
Keyword(3) filter
Keyword(4) BCB
Keyword(5) flip-chip
1st Author's Name Kazuuaki Takahashi
1st Author's Affiliation Mobile Communication Research Laboratory, Matsushita Research Institute Tokyo, Inc.()
2nd Author's Name Suguru Fujita
2nd Author's Affiliation Mobile Communication Research Laboratory, Matsushita Research Institute Tokyo, Inc.
3rd Author's Name Ushio Sangawa
3rd Author's Affiliation Mobile Communication Research Laboratory, Matsushita Research Institute Tokyo, Inc.
4th Author's Name Takeharu Urabe
4th Author's Affiliation Opto-Electro Mechanics Research Laboratory, Matsushita Research Institute Tokyo, Inc.
5th Author's Name Hiroshi Ogura
5th Author's Affiliation Opto-Electro Mechanics Research Laboratory, Matsushita Research Institute Tokyo, Inc.
6th Author's Name Hiroyuki Yabuki
6th Author's Affiliation Mobile Communication Research Laboratory, Matsushita Research Institute Tokyo, Inc.
Date 2000/1/20
Paper # ED99-277,MW99-201,ICD99-252
Volume (vol) vol.99
Number (no) 557
Page pp.pp.-
#Pages 6
Date of Issue