| Presentation | 2000/1/20 Preparation of Co-Cr-Ta/Ti perpendicular magnetic recording disk using ECR-sputter-deposition : Effect of microwave power Tomohiro IKEDA, Setsuo YAMAMOTO, Kei HIRATA, Hiroki KURISU, Mitsuru MATSUURA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In sputtering apparatus using electron-cyclotoron-resonance microwave plasma, microwave power was focused to achieve high quality Co-Cr-Ta/Ti perpendicular magnetic recording disk. Plasma density, deposition rate and quantity of Ar ion irradiation during film deposition were increased with increasing microwave power. A perpendicular magnetic disk with fine grains exhibiting superior magnetic and recording performance was fabricated at high average deposition rate by controlling microwave power, that is, microwave was changed from high power to low power during Co-Cr-Ta film deposition. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Electron-cyclotron-resonance / ECR sputtering / Co-Cr-Ta / perpendicular magnetic recording / magnetic disk |
| Paper # | MR99-71 |
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| Conference Information | |
| Committee | MR |
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| Conference Date | 2000/1/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Magnetic Recording (MR) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Preparation of Co-Cr-Ta/Ti perpendicular magnetic recording disk using ECR-sputter-deposition : Effect of microwave power |
| Sub Title (in English) | |
| Keyword(1) | Electron-cyclotron-resonance |
| Keyword(2) | ECR sputtering |
| Keyword(3) | Co-Cr-Ta |
| Keyword(4) | perpendicular magnetic recording |
| Keyword(5) | magnetic disk |
| 1st Author's Name | Tomohiro IKEDA |
| 1st Author's Affiliation | Faculty of Engineering, Yamaguchi University() |
| 2nd Author's Name | Setsuo YAMAMOTO |
| 2nd Author's Affiliation | Faculty of Engineering, Yamaguchi University |
| 3rd Author's Name | Kei HIRATA |
| 3rd Author's Affiliation | Faculty of Engineering, Yamaguchi University |
| 4th Author's Name | Hiroki KURISU |
| 4th Author's Affiliation | Faculty of Engineering, Yamaguchi University |
| 5th Author's Name | Mitsuru MATSUURA |
| 5th Author's Affiliation | Faculty of Engineering, Yamaguchi University |
| Date | 2000/1/20 |
| Paper # | MR99-71 |
| Volume (vol) | vol.99 |
| Number (no) | 572 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |