| Presentation | 2000/2/10 Fabrication of GaN micro-structures on(111)Si by selective area growth by MOVPE Y. Honda, Y. Ohtake, Y. Kawaguchi, M. Yamaguchi, N. Sawaki, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Selective area growth(SAG)of stripe structure and hexagonal pyramids of GaN on a(111)Si substrate is studied with AlGaN intermediate layer. The crystalinity is much improved by the SAG as compared to that due to a conventional method. It is demonstrated that the formation process of the intermediate layer is the key issue to improve the optical properties as well as the crystalinity. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | GaN / Selective area growth / MOVPE / microstructure |
| Paper # | ED99-309, SDM99-202 |
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| Conference Information | |
| Committee | ED |
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| Conference Date | 2000/2/10(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of GaN micro-structures on(111)Si by selective area growth by MOVPE |
| Sub Title (in English) | |
| Keyword(1) | GaN |
| Keyword(2) | Selective area growth |
| Keyword(3) | MOVPE |
| Keyword(4) | microstructure |
| 1st Author's Name | Y. Honda |
| 1st Author's Affiliation | Nagoya University, Department of Electronics, Graduate School of Engineering() |
| 2nd Author's Name | Y. Ohtake |
| 2nd Author's Affiliation | Nagoya University, Department of Electronics, Graduate School of Engineering |
| 3rd Author's Name | Y. Kawaguchi |
| 3rd Author's Affiliation | Nagoya University, Department of Electronics, Graduate School of Engineering |
| 4th Author's Name | M. Yamaguchi |
| 4th Author's Affiliation | Nagoya University, Department of Electronics, Graduate School of Engineering |
| 5th Author's Name | N. Sawaki |
| 5th Author's Affiliation | Nagoya University, Department of Electronics, Graduate School of Engineering |
| Date | 2000/2/10 |
| Paper # | ED99-309, SDM99-202 |
| Volume (vol) | vol.99 |
| Number (no) | 616 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |