Presentation 2000/2/9
Microscopic Analyses on InGaAs Ridge Quantum Wire Structures Grown by Selective Molecular Beam Epitaxy
Jiang C, H. Fujikura, T. Muranaka, H. Hasegawa,
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Abstract(in English) From SEM, AFM and TEM observations, nonuniformity of the InGaAs ridge quantum wires (QWRs) by selective MBE growth was found to mainly due to the waving of underlying InAlAs ridge caused by formation or irregular InGaAs islands at the intial stage of the InGaAs buffer layer growth.The island formation and ridge waving were completely removed by using optimized substrate cleaning and growth procedure.Formation of a verical region with low In composition having a width of 10-20 nm and bisecting the whole QWR structure including the QWR itself was observed by TEM / EDX analysis.The conventional adatom diffusion theory alone can not explain this phenomenon and it is necessary to take account of effects of a curvature induced capillarity and a free energy of alloy mixing.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Selective MBE / Quantum wires / InGaAs/InAlAs / uniformity / alloy composition / SEM / AFM / TEM
Paper # ED99-303,SDM99-196
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Committee ED
Conference Date 2000/2/9(1days)
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Registration To Electron Devices (ED)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Microscopic Analyses on InGaAs Ridge Quantum Wire Structures Grown by Selective Molecular Beam Epitaxy
Sub Title (in English)
Keyword(1) Selective MBE
Keyword(2) Quantum wires
Keyword(3) InGaAs/InAlAs
Keyword(4) uniformity
Keyword(5) alloy composition
Keyword(6) SEM
Keyword(7) AFM
Keyword(8) TEM
1st Author's Name Jiang C
1st Author's Affiliation Research Center for Interface Quantum Electronics:Graduate School of Electronics and Information Engineering, Hokkaido University()
2nd Author's Name H. Fujikura
2nd Author's Affiliation Research Center for Interface Quantum Electronics:Graduate School of Electronics and Information Engineering, Hokkaido University
3rd Author's Name T. Muranaka
3rd Author's Affiliation Research Center for Interface Quantum Electronics:Graduate School of Electronics and Information Engineering, Hokkaido University
4th Author's Name H. Hasegawa
4th Author's Affiliation Research Center for Interface Quantum Electronics:Graduate School of Electronics and Information Engineering, Hokkaido University
Date 2000/2/9
Paper # ED99-303,SDM99-196
Volume (vol) vol.99
Number (no) 615
Page pp.pp.-
#Pages 8
Date of Issue