| Presentation | 2000/2/9 Si Dot Thin-Film-Transistor Memory Kazumasa Nomoto, Pal Gosain Dharam, Takashi Noguchi, Setsuo Usui, Yoshifumi Mori, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We fabricated a novel poly-Si thin-film-transistor based memory with a Si-nano-crystal(Si dot)floating gate.Although we employed a quartz as a substrate, all the fabrication process has been done at a substrate temperature below 400°C which is compatible with the use of a glass substrate.We have developed a method in which XeCl excimer laser annealing of a Si-rich oxide film induced a separation of stoichiometrically excess Si as Si-nano-crystals.A device showed threshold voltage shift of ±2 V with gate-voltage pulse of ±20 V, 10 ms.The data retention time was 10~3s and the threshold voltage shift did not decrease up to 10~4 write / erase cycles. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | poly-Si / Si-nano-crystal / XeCl excimer laser / thin film transistor / memory |
| Paper # | ED99-296,SDM99-189 |
| Date of Issue |
| Conference Information | |
| Committee | ED |
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| Conference Date | 2000/2/9(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electron Devices (ED) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Si Dot Thin-Film-Transistor Memory |
| Sub Title (in English) | |
| Keyword(1) | poly-Si |
| Keyword(2) | Si-nano-crystal |
| Keyword(3) | XeCl excimer laser |
| Keyword(4) | thin film transistor |
| Keyword(5) | memory |
| 1st Author's Name | Kazumasa Nomoto |
| 1st Author's Affiliation | Frontier Science Laboratory, Sony Corporation() |
| 2nd Author's Name | Pal Gosain Dharam |
| 2nd Author's Affiliation | Frontier Science Laboratory, Sony Corporation |
| 3rd Author's Name | Takashi Noguchi |
| 3rd Author's Affiliation | Frontier Science Laboratory, Sony Corporation |
| 4th Author's Name | Setsuo Usui |
| 4th Author's Affiliation | Frontier Science Laboratory, Sony Corporation |
| 5th Author's Name | Yoshifumi Mori |
| 5th Author's Affiliation | Frontier Science Laboratory, Sony Corporation |
| Date | 2000/2/9 |
| Paper # | ED99-296,SDM99-189 |
| Volume (vol) | vol.99 |
| Number (no) | 615 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |