Presentation 2000/2/23
Theoretical Analysis of GaN Based Resonant Cavity-Enhanced UV-Photodetector and Fabrication of AlGaN DBR by RF-MBE
Yosuke Toyoura, Kazuhide Kusakabe, Shinichi Nakamura, Daisuke Sugihara, Takayuki Yamada, Akihiko Kikuchi, Katsumi Kishino,
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Abstract(in English) The resonant cavity-enhanced photodetector(RCE-PD)is expected to have wavelength selectivity, high quantum efficiency and high speed characteristics. The photosensitivity characteristics of AlGaN based RCE-PD was theoretically investigated. The AlGaN distributed Bragg reflectors for at blue and UV region were grown by molecular beam epitaxy using RF-plasma excited nitrogen. Relatively high reflectivity of 95% and 92% was achieved at the wavelength of 444nm and 377nm, respectively.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) resonance cavity-enhanced phtodetector / ultraviolet photodetector / quantum efficiency / distributed Bragg reflectors / GaN / AlN
Paper # OFT99-54,OPE99-142
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Committee OFT
Conference Date 2000/2/23(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Theoretical Analysis of GaN Based Resonant Cavity-Enhanced UV-Photodetector and Fabrication of AlGaN DBR by RF-MBE
Sub Title (in English)
Keyword(1) resonance cavity-enhanced phtodetector
Keyword(2) ultraviolet photodetector
Keyword(3) quantum efficiency
Keyword(4) distributed Bragg reflectors
Keyword(5) GaN
Keyword(6) AlN
1st Author's Name Yosuke Toyoura
1st Author's Affiliation Department of Electrical and Electronics Engineering, Sophia University()
2nd Author's Name Kazuhide Kusakabe
2nd Author's Affiliation Department of Electrical and Electronics Engineering, Sophia University
3rd Author's Name Shinichi Nakamura
3rd Author's Affiliation Department of Electrical and Electronics Engineering, Sophia University
4th Author's Name Daisuke Sugihara
4th Author's Affiliation Department of Electrical and Electronics Engineering, Sophia University
5th Author's Name Takayuki Yamada
5th Author's Affiliation Department of Electrical and Electronics Engineering, Sophia University
6th Author's Name Akihiko Kikuchi
6th Author's Affiliation Department of Electrical and Electronics Engineering, Sophia University
7th Author's Name Katsumi Kishino
7th Author's Affiliation Department of Electrical and Electronics Engineering, Sophia University
Date 2000/2/23
Paper # OFT99-54,OPE99-142
Volume (vol) vol.99
Number (no) 650
Page pp.pp.-
#Pages 6
Date of Issue