| Presentation | 2002/8/23 Optical MCM technology for 3D LSI Tomonori NAKAMURA, Toru HASHIMOTO, Jeoung Chill SHIM, Hiroyuki KURINO, Mitsumasa KOYANAGI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In order to overcome wiring problem in future electric system, we proposed a new optical interconnection technology for a multi chip module system assembled from three dimensional LSI's. In this multi chip module, 3D LSI's with VCSEL's are mounted on the optical plate which transfer the optical signal between 3D LSI's through polyimide optical wave guides. We have developed the three dimensional integration technology and optical interconnection technology to realize the optical MCM. In this paper, we mainly presented the fabrication process for the optical MCM and basic evaluation results of optical interconnection. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | three dimensional LSI / Optical interconnection / wave guide / VCSEL / Optical MCM / IO bottleneck |
| Paper # | LQE2002-117 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2002/8/23(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Optical MCM technology for 3D LSI |
| Sub Title (in English) | |
| Keyword(1) | three dimensional LSI |
| Keyword(2) | Optical interconnection |
| Keyword(3) | wave guide |
| Keyword(4) | VCSEL |
| Keyword(5) | Optical MCM |
| Keyword(6) | IO bottleneck |
| 1st Author's Name | Tomonori NAKAMURA |
| 1st Author's Affiliation | Dept. of Machine Intelligence and Systems Engineering, Tohoku University() |
| 2nd Author's Name | Toru HASHIMOTO |
| 2nd Author's Affiliation | Dept. of Machine Intelligence and Systems Engineering, Tohoku University |
| 3rd Author's Name | Jeoung Chill SHIM |
| 3rd Author's Affiliation | Dept. of Machine Intelligence and Systems Engineering, Tohoku University |
| 4th Author's Name | Hiroyuki KURINO |
| 4th Author's Affiliation | Dept. of Machine Intelligence and Systems Engineering, Tohoku University |
| 5th Author's Name | Mitsumasa KOYANAGI |
| 5th Author's Affiliation | Dept. of Machine Intelligence and Systems Engineering, Tohoku University |
| Date | 2002/8/23 |
| Paper # | LQE2002-117 |
| Volume (vol) | vol.102 |
| Number (no) | 290 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |