Presentation | 2002/8/23 Laser-to-Fiber Alignment Using MEMS Technologies Koji ISHIKAWA, Qiang YU, Yung-Cheng LEE, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We report a new optical beam alignment concept between a laser and an optical fiber. An integrated MEMS (micro-electro-mechanical systems) platform, which has a thermally-actuated micromirror, 3-D solder self-assembly structures and a silicon etched v-groove, is successfully fabricated and actuated for beam adjustment from a VCSEL (vertical-cavity surface-emitting laser) to a fiber. The alignment system has 4.0 degree maximum beam steering angle with the resolution of 0.08 degree/mA. With the steering angle reaching 2.5 degrees, the coupling efficiency improves to 80 % from 9 % initial efficiency. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | MEMS / VCSEL / Fiber / Micromirror / Alignment / Coupling |
Paper # | LQE2002-116 |
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Committee | LQE |
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Conference Date | 2002/8/23(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Lasers and Quantum Electronics (LQE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Laser-to-Fiber Alignment Using MEMS Technologies |
Sub Title (in English) | |
Keyword(1) | MEMS |
Keyword(2) | VCSEL |
Keyword(3) | Fiber |
Keyword(4) | Micromirror |
Keyword(5) | Alignment |
Keyword(6) | Coupling |
1st Author's Name | Koji ISHIKAWA |
1st Author's Affiliation | R&D Department 1, NHK Spring Co.,Ltd.() |
2nd Author's Name | Qiang YU |
2nd Author's Affiliation | Yokohama National University |
3rd Author's Name | Yung-Cheng LEE |
3rd Author's Affiliation | University of Colorado at Boulder Campus |
Date | 2002/8/23 |
Paper # | LQE2002-116 |
Volume (vol) | vol.102 |
Number (no) | 290 |
Page | pp.pp.- |
#Pages | 6 |
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