Presentation 2002/8/23
Laser-to-Fiber Alignment Using MEMS Technologies
Koji ISHIKAWA, Qiang YU, Yung-Cheng LEE,
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Abstract(in English) We report a new optical beam alignment concept between a laser and an optical fiber. An integrated MEMS (micro-electro-mechanical systems) platform, which has a thermally-actuated micromirror, 3-D solder self-assembly structures and a silicon etched v-groove, is successfully fabricated and actuated for beam adjustment from a VCSEL (vertical-cavity surface-emitting laser) to a fiber. The alignment system has 4.0 degree maximum beam steering angle with the resolution of 0.08 degree/mA. With the steering angle reaching 2.5 degrees, the coupling efficiency improves to 80 % from 9 % initial efficiency.
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Keyword(in English) MEMS / VCSEL / Fiber / Micromirror / Alignment / Coupling
Paper # OPE2002-61
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Committee OPE
Conference Date 2002/8/23(1days)
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Registration To Optoelectronics (OPE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Laser-to-Fiber Alignment Using MEMS Technologies
Sub Title (in English)
Keyword(1) MEMS
Keyword(2) VCSEL
Keyword(3) Fiber
Keyword(4) Micromirror
Keyword(5) Alignment
Keyword(6) Coupling
1st Author's Name Koji ISHIKAWA
1st Author's Affiliation R&D Department 1, NHK Spring Co.,Ltd.()
2nd Author's Name Qiang YU
2nd Author's Affiliation Yokohama National University
3rd Author's Name Yung-Cheng LEE
3rd Author's Affiliation University of Colorado at Boulder
Date 2002/8/23
Paper # OPE2002-61
Volume (vol) vol.102
Number (no) 288
Page pp.pp.-
#Pages 6
Date of Issue