Presentation	2005-08-18 A Test Structure to Analyze (Highly-Doped/Lightly-Doped)-Drain in LDD-Type CMOSFET Takashi OHZONE, Toshihiro MATSUDA, Kazuhiro OKADA, Takayuki MORISHITA, Kiyotaka KOMOKU, Hideyuki IWATA,
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Abstract(in English)	A test structure to separately measure sheet resistances of highly-doped-drain (HDD) and lightly- doped-drain (LDD) in LDD-type CMOSFETs with various gate spaces S having sub-100nm sidewalls was proposed. From the reciprocal of source/drain-resistance R^<-1> versus S characteristics, the sheet resistance ρ_H of the high-conductive-region (HCR) corresponding to HDD and the approximate width W_ of the low-conductive-region (LCR) corresponding to LDD could be estimated. The R^<-1> versus S characteristics showed the unstable resistance variations in the narrow S region less than 0.3μm, which corresponded to the minimum S for the process used for the test device fabrication and suggested that various micro-loading effects seriously affected on the characteristics.
Keyword(in Japanese)	(See Japanese page)
Keyword(in English)	CMOSFET / LDD-type / source/drain-resistance / sheet resistance
Paper #	SDM2005-137,ICD2005-76
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Conference Information
Committee	ICD
Conference Date	2005/8/11(1days)
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Paper Information
Registration To	Integrated Circuits and Devices (ICD)
Language	JPN
Title (in Japanese)	(See Japanese page)
Sub Title (in Japanese)	(See Japanese page)
Title (in English)	A Test Structure to Analyze (Highly-Doped/Lightly-Doped)-Drain in LDD-Type CMOSFET
Sub Title (in English)
Keyword(1)	CMOSFET
Keyword(2)	LDD-type
Keyword(3)	source/drain-resistance
Keyword(4)	sheet resistance
1st Author's Name	Takashi OHZONE
1st Author's Affiliation	Faculty of Computer Science and System Engineering, Okayama Prefectural University()
2nd Author's Name	Toshihiro MATSUDA
2nd Author's Affiliation	Faculty of Engineering, Toyama Prefectural University
3rd Author's Name	Kazuhiro OKADA
3rd Author's Affiliation	Faculty of Computer Science and System Engineering, Okayama Prefectural University
4th Author's Name	Takayuki MORISHITA
4th Author's Affiliation	Faculty of Computer Science and System Engineering, Okayama Prefectural University
5th Author's Name	Kiyotaka KOMOKU
5th Author's Affiliation	Faculty of Computer Science and System Engineering, Okayama Prefectural University
6th Author's Name	Hideyuki IWATA
6th Author's Affiliation	Faculty of Engineering, Toyama Prefectural University
Date	2005-08-18
Paper #	SDM2005-137,ICD2005-76
Volume (vol)	vol.105
Number (no)	234
Page	pp.pp.-
#Pages	6
Date of Issue