| Presentation | 2005/7/1 Fabrication of magnetic nanodot arrays for patterned media using wet processes Takayuki HOMMA, Jun KAWAJI, Daisuke NIWA, Hideyuki OIKAWA, Ryohei KAMEO, Tetsuya OSAKA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Magnetic nanodot arrays for patterned recording media were prepared by using wet processes. CoNiP magnetic alloy was successfully deposited into the patterned pore on the Si substrate with SiO_2 mold by using electroless deposition. Uniform formation of fine CoNiP dot arrays was achieved by application of activation process prior to the electroless deposition. Futhermore, the magnetic signal was detected from the dots using magnetic force microscopy (MFM). In addition to the electroless deposition process, electrodeposited hcp-CoPt alloy was applied as dot materials because of its high magnetic anisotropy energy. Optimization of electrodeposition condition for CoPt, which strongly affected the alloy composition, enabled to obtain uniform CoPt dot arrays on SiO_2/Si substrate. On the other hand, novel electron beam lithography process was developed for further high-resolution patterning for fabricating nm scale dot patterns. Combination process of electron beam lithography for organosilane self-assembled monolayer modified surface and pattern transfer by wet chemical etching resulted in the fabrication of dot pattern with as small as 20nm in diameter. These processes for metal deposition and nano-pattering are promising candidates for the fabrication of patterned media. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Patterned Media / Magnetic Dot Arrays / Electrodeposition / Electroless Deposition / Electron Beam Lithography / Self-Assembled Monolayer |
| Paper # | MR2005-21 |
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| Conference Information | |
| Committee | MR |
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| Conference Date | 2005/7/1(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Magnetic Recording (MR) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of magnetic nanodot arrays for patterned media using wet processes |
| Sub Title (in English) | |
| Keyword(1) | Patterned Media |
| Keyword(2) | Magnetic Dot Arrays |
| Keyword(3) | Electrodeposition |
| Keyword(4) | Electroless Deposition |
| Keyword(5) | Electron Beam Lithography |
| Keyword(6) | Self-Assembled Monolayer |
| 1st Author's Name | Takayuki HOMMA |
| 1st Author's Affiliation | School of Science and Engineering, Waseda University() |
| 2nd Author's Name | Jun KAWAJI |
| 2nd Author's Affiliation | School of Science and Engineering, Waseda University |
| 3rd Author's Name | Daisuke NIWA |
| 3rd Author's Affiliation | School of Science and Engineering, Waseda University |
| 4th Author's Name | Hideyuki OIKAWA |
| 4th Author's Affiliation | School of Science and Engineering, Waseda University |
| 5th Author's Name | Ryohei KAMEO |
| 5th Author's Affiliation | School of Science and Engineering, Waseda University |
| 6th Author's Name | Tetsuya OSAKA |
| 6th Author's Affiliation | School of Science and Engineering, Waseda University |
| Date | 2005/7/1 |
| Paper # | MR2005-21 |
| Volume (vol) | vol.105 |
| Number (no) | 167 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |