Presentation 2005/7/1
Small Grain FePt Films Prepared by Rapid Thermal Annealing
Akiyoshi ITOH, Yuji ITOH, Arata TSUKAMOTO, Katsyji NAKAGAWA,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) We have succeeded to obtain perpendicular magnetized films consists of small grains of FePt by using a rapid thermal annealing : RTA method on to thermally oxidized SiO_2 thin films on Si substrates. As deposited films of FePt by sputtering method are continuous films, however after RTA, they become small grains of (001) oriented L1_0 phase crystalline structure showing a perpendicular magnetization. The average grain diameter is strongly depended on the film thickness of as sputtered film before RTA. The smallest average diameter was 7nm. Coercivity enhancement in the TbFeCo films fabricated on those small grains of FePt is also shown.
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Keyword(in English) FePt / TbFeCo / small grains / rapid thermal annealing / composite films / hybrid recording
Paper # MR2005-18
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Committee MR
Conference Date 2005/7/1(1days)
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Registration To Magnetic Recording (MR)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Small Grain FePt Films Prepared by Rapid Thermal Annealing
Sub Title (in English)
Keyword(1) FePt
Keyword(2) TbFeCo
Keyword(3) small grains
Keyword(4) rapid thermal annealing
Keyword(5) composite films
Keyword(6) hybrid recording
1st Author's Name Akiyoshi ITOH
1st Author's Affiliation Departmentt of Electronics and Computer Science, College of Science and Technology, NIHON Univfderisty()
2nd Author's Name Yuji ITOH
2nd Author's Affiliation / Departmentt of Electronics and Computer Science, College of Science and Technology, NIHON Univfderisty
3rd Author's Name Arata TSUKAMOTO
3rd Author's Affiliation Departmentt of Electronics and Computer Science, College of Science and Technology, NIHON Univfderisty
4th Author's Name Katsyji NAKAGAWA
4th Author's Affiliation
Date 2005/7/1
Paper # MR2005-18
Volume (vol) vol.105
Number (no) 167
Page pp.pp.-
#Pages 6
Date of Issue