| Presentation | 2005-09-08 Characteristic dielectric constant for polyimide thin films at 10GHz Sigemasa Segawa, Sachiko Ito, Katsuya Kikuchi, Kazuhiko Tokoro, Hiroshi Nakagawa, Masahiro Aoyagi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In order to realize improvement in the high-speed and high-density integration, a low dielectric property material should be developed. In order to perform development of a low dielectric material quickly, the simple and highly precise dielectric property measurement system is required. The cavity resonance perturbation method was chosen in dielectric property measuring methods of a high frequency band, and we investigated so that it could measure with high precision. The measurement system was calibrated by using synthetic quartz as a standard material of dielectric property. Moreover, the measurement condition of a vector network analyzer (VNA) was optimized. The ultra-thin polyimide film could be measured successfully. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Cavity Resonance Perturbation Method / quart / Vector Network Analyzer / IFBW / Polyimide / Thin Film |
| Paper # | CPM2005-86,ICD2005-96 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2005/9/1(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Characteristic dielectric constant for polyimide thin films at 10GHz |
| Sub Title (in English) | |
| Keyword(1) | Cavity Resonance Perturbation Method |
| Keyword(2) | quart |
| Keyword(3) | Vector Network Analyzer |
| Keyword(4) | IFBW |
| Keyword(5) | Polyimide |
| Keyword(6) | Thin Film |
| 1st Author's Name | Sigemasa Segawa |
| 1st Author's Affiliation | PI R&D Co., LTD() |
| 2nd Author's Name | Sachiko Ito |
| 2nd Author's Affiliation | AIST |
| 3rd Author's Name | Katsuya Kikuchi |
| 3rd Author's Affiliation | AIST |
| 4th Author's Name | Kazuhiko Tokoro |
| 4th Author's Affiliation | AIST |
| 5th Author's Name | Hiroshi Nakagawa |
| 5th Author's Affiliation | AIST |
| 6th Author's Name | Masahiro Aoyagi |
| 6th Author's Affiliation | AIST |
| Date | 2005-09-08 |
| Paper # | CPM2005-86,ICD2005-96 |
| Volume (vol) | vol.105 |
| Number (no) | 265 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |