Presentation 2003/4/18
3D-MEMS Optical Switch using Roof-type Retroreflector
Tamotsu AKASHI, Shinichi TAKEUCHI, Tsuyoshi YAMAMOTO, Kazuyuki MORI, Satoshi UEDA, Masaaki KAWAI,
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Abstract(in English) We developed a compact and easy-to-fabricate 3D-MEMS optical switch fabric. By folding the optical system with a roof-type retroreflector, we made the switch fabric compact. We analyzed the alignment tolerance of the roof-type retroreflector, and showed that by applying the optical beam deflection method of "f-theta lens" to optical alignment, the tolerances were drastically increased. This technique allowed us to mount optical components passively, and the optical switch fabrication process was greatly simplified. Using this technique, we have succeeded in developing a compact, low-loss, and fast switching 80×80 3D-MEMS optical switch.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Optical switch / 3D-MEMS / Retroreflector / Alignment
Paper # R2003-4,CPM2003-4,OPE2003-4
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Committee R
Conference Date 2003/4/18(1days)
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Language JPN
Title (in Japanese) (See Japanese page)
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Title (in English) 3D-MEMS Optical Switch using Roof-type Retroreflector
Sub Title (in English)
Keyword(1) Optical switch
Keyword(2) 3D-MEMS
Keyword(3) Retroreflector
Keyword(4) Alignment
1st Author's Name Tamotsu AKASHI
1st Author's Affiliation Network Systems Laboratory, Fujitsu Laboratories Ltd.()
2nd Author's Name Shinichi TAKEUCHI
2nd Author's Affiliation Network Systems Laboratory, Fujitsu Laboratories Ltd.
3rd Author's Name Tsuyoshi YAMAMOTO
3rd Author's Affiliation Network Systems Laboratory, Fujitsu Laboratories Ltd.
4th Author's Name Kazuyuki MORI
4th Author's Affiliation Network Systems Laboratory, Fujitsu Laboratories Ltd.
5th Author's Name Satoshi UEDA
5th Author's Affiliation Peripheral Systems Laboratory, Fujitsu Laboratories Ltd.
6th Author's Name Masaaki KAWAI
6th Author's Affiliation Network Systems Laboratory, Fujitsu Laboratories Ltd.
Date 2003/4/18
Paper # R2003-4,CPM2003-4,OPE2003-4
Volume (vol) vol.103
Number (no) 33
Page pp.pp.-
#Pages 6
Date of Issue