| Presentation | 1994/2/16 Fabrication of Submicrometer-Sizd SIS Junctions Takashi Noguchi, Akihiro Sakamoto, Satoshi Ochiai, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A new fabrication process are proposed for high-quality and high current-density SIS junctions,which are applicable to SIS mixers in the submillimeter-wave region.Before the deposition of insulator through the selfalligned photoresist mask,a thick anodized oxide layer was formed around SIS junctions.By the introduction of the anodization process,high-quality SIS junctions with the size of submicrometer have been successfully fabricated. Submicrometer sized-SIS junctions with current densities larger than 10kA, cm^2 have also been succeeded with the new process. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SIS junction / SIS mixer / submillimeter-wave receiver / anodization / submicrometer |
| Paper # | SCE93-64,CPM93-118 |
| Date of Issue |
| Conference Information | |
| Committee | SCE |
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| Conference Date | 1994/2/16(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Superconductive Electronics (SCE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of Submicrometer-Sizd SIS Junctions |
| Sub Title (in English) | |
| Keyword(1) | SIS junction |
| Keyword(2) | SIS mixer |
| Keyword(3) | submillimeter-wave receiver |
| Keyword(4) | anodization |
| Keyword(5) | submicrometer |
| 1st Author's Name | Takashi Noguchi |
| 1st Author's Affiliation | Nobeyama Radio Observatory() |
| 2nd Author's Name | Akihiro Sakamoto |
| 2nd Author's Affiliation | Nobeyama Radio Observatory |
| 3rd Author's Name | Satoshi Ochiai |
| 3rd Author's Affiliation | Communication Research Laboratory |
| Date | 1994/2/16 |
| Paper # | SCE93-64,CPM93-118 |
| Volume (vol) | vol.93 |
| Number (no) | 461 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |