| Presentation | 1994/2/16 Simultaneous fabrication of Nb/AlOx-Al/Nb Josephson junctions having different tunnel barriers Jun'ichi Shimada, Akiyoshi Nakayama, Kazuhiro Yamamoto, Yasuyuki Kodera, Hiroyuki Nanba, Yoichi Okabe, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We simultaneously fabricated Nb, AlOx-Al/Nb Josephson junctions having different tunnel barriers using dc magnetron sputtering apparatus with load lock system.This apparatus can carry a 2-in. diameter sample.We studied the tunnel barrier dependence of the junction characteristics.The I-V characteristics showed the maximum Rsg/Rn value when Aluminum thickness was 3 nm.The quasiparticle characteristics in the vicinity of the gap voltage remarkably leaned when Aluminum thickness was more than 15 nm. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Load Lock system / Batch system / Nb/lOx-Al/b Josephson Junction / Tunnel barrier / Knee structure |
| Paper # | SCE93-63,CPM93-117 |
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| Conference Information | |
| Committee | SCE |
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| Conference Date | 1994/2/16(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Paper Information | |
| Registration To | Superconductive Electronics (SCE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Simultaneous fabrication of Nb/AlOx-Al/Nb Josephson junctions having different tunnel barriers |
| Sub Title (in English) | |
| Keyword(1) | Load Lock system |
| Keyword(2) | Batch system |
| Keyword(3) | Nb/lOx-Al/b Josephson Junction |
| Keyword(4) | Tunnel barrier |
| Keyword(5) | Knee structure |
| 1st Author's Name | Jun'ichi Shimada |
| 1st Author's Affiliation | Department of Electrical Engineering,Faculty of Engineering Kanagawa University() |
| 2nd Author's Name | Akiyoshi Nakayama |
| 2nd Author's Affiliation | Department of Electrical Engineering,Faculty of Engineering Kanagawa University |
| 3rd Author's Name | Kazuhiro Yamamoto |
| 3rd Author's Affiliation | Department of Electrical Engineering,Faculty of Engineering Kanagawa University |
| 4th Author's Name | Yasuyuki Kodera |
| 4th Author's Affiliation | Department of Electrical Engineering,Faculty of Engineering Kanagawa University |
| 5th Author's Name | Hiroyuki Nanba |
| 5th Author's Affiliation | Department of Electrical Engineering,Faculty of Engineering Kanagawa University |
| 6th Author's Name | Yoichi Okabe |
| 6th Author's Affiliation | Research Center for Advanced Science and Technology,University of Tokyo |
| Date | 1994/2/16 |
| Paper # | SCE93-63,CPM93-117 |
| Volume (vol) | vol.93 |
| Number (no) | 461 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |