Presentation 1994/2/16
Preparation of infinite-layer thin films and multilayers by sputtering
Hideaki Adachi, Toshifumi Satoh, Kentaro Setsune,
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Abstract(in English) ″Infinite-layer″ superconducting thin films and multilayers hav e been prepared by spurrering method.Using the sputtering target with reduced oxygen contents,infinitelayer structure was obtained stably in thin films.Substitution of Sr by Nd was tried and the(Sr, Nd)CuO_2 film showed superconductivity similar to the ceramics made by highpressure sintering.As for the infinite-layer multilayers,we succeeded in the preparation of SrCuO_2, (Sr,Ca)CuO_ 2 and(Sr,Ca)CuO_2/(Sr,Ca)RuO_3 structures.It was found that the planar dislocation could be restrained by the multilayer structure.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) infinite-layer / superconductor / thin film / multilayer / sputtering
Paper # SCE93-59,CPM93-113
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Conference Information
Committee SCE
Conference Date 1994/2/16(1days)
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Registration To Superconductive Electronics (SCE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Preparation of infinite-layer thin films and multilayers by sputtering
Sub Title (in English)
Keyword(1) infinite-layer
Keyword(2) superconductor
Keyword(3) thin film
Keyword(4) multilayer
Keyword(5) sputtering
1st Author's Name Hideaki Adachi
1st Author's Affiliation Matsushita Electric Industrial()
2nd Author's Name Toshifumi Satoh
2nd Author's Affiliation Matsushita Electric Industrial
3rd Author's Name Kentaro Setsune
3rd Author's Affiliation Matsushita Electric Industrial
Date 1994/2/16
Paper # SCE93-59,CPM93-113
Volume (vol) vol.93
Number (no) 461
Page pp.pp.-
#Pages 6
Date of Issue