Presentation 1994/2/16
MBE growth of oxide thin films using mass-separated low-energy oxygen ion beams
Kenichi Kawaguchi, Govind Pindoria, Ryusuke Kita, Madoka Nishiyama, Tadataka Morishita,
PDF Download Page PDF download Page Link
Abstract(in Japanese) (See Japanese page)
Abstract(in English) We propose a new oxygen source of mass-separated low-energy oxygen ion(O+)beams for MBE growth of oxide thin films in ultrahigh vacuum.The oxygen ions have excellent ability of oxidation and can be highly purified.Moreover,incident flux and kinetic energy of the O+ beam can be easily controlled.CuO thin films were epitaxially grown on(001)MgO substrates at 100℃ in ultr ahigh vacuum of 3x10-9 Torr using the O+ beam.We also show a possibility of direct control of oxygen stoichiometry in oxide thin films by flux ratio of O+ to metallic elements.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) mass-separated low-energy oxygen ion beam / oxide thin film / MBE growth
Paper # SCE93-57,CPM93-111
Date of Issue

Conference Information
Committee SCE
Conference Date 1994/2/16(1days)
Place (in Japanese) (See Japanese page)
Place (in English)
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair
Vice Chair
Secretary
Assistant

Paper Information
Registration To Superconductive Electronics (SCE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) MBE growth of oxide thin films using mass-separated low-energy oxygen ion beams
Sub Title (in English)
Keyword(1) mass-separated low-energy oxygen ion beam
Keyword(2) oxide thin film
Keyword(3) MBE growth
1st Author's Name Kenichi Kawaguchi
1st Author's Affiliation Superconductivity Research Laboratory,ISTEC()
2nd Author's Name Govind Pindoria
2nd Author's Affiliation Superconductivity Research Laboratory,ISTEC
3rd Author's Name Ryusuke Kita
3rd Author's Affiliation Superconductivity Research Laboratory,ISTEC
4th Author's Name Madoka Nishiyama
4th Author's Affiliation Superconductivity Research Laboratory,ISTEC
5th Author's Name Tadataka Morishita
5th Author's Affiliation Superconductivity Research Laboratory,ISTEC
Date 1994/2/16
Paper # SCE93-57,CPM93-111
Volume (vol) vol.93
Number (no) 461
Page pp.pp.-
#Pages 6
Date of Issue