Presentation | 1994/2/16 MBE growth of oxide thin films using mass-separated low-energy oxygen ion beams Kenichi Kawaguchi, Govind Pindoria, Ryusuke Kita, Madoka Nishiyama, Tadataka Morishita, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We propose a new oxygen source of mass-separated low-energy oxygen ion(O+)beams for MBE growth of oxide thin films in ultrahigh vacuum.The oxygen ions have excellent ability of oxidation and can be highly purified.Moreover,incident flux and kinetic energy of the O+ beam can be easily controlled.CuO thin films were epitaxially grown on(001)MgO substrates at 100℃ in ultr ahigh vacuum of 3x10-9 Torr using the O+ beam.We also show a possibility of direct control of oxygen stoichiometry in oxide thin films by flux ratio of O+ to metallic elements. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | mass-separated low-energy oxygen ion beam / oxide thin film / MBE growth |
Paper # | SCE93-57,CPM93-111 |
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Committee | SCE |
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Conference Date | 1994/2/16(1days) |
Place (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Superconductive Electronics (SCE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | MBE growth of oxide thin films using mass-separated low-energy oxygen ion beams |
Sub Title (in English) | |
Keyword(1) | mass-separated low-energy oxygen ion beam |
Keyword(2) | oxide thin film |
Keyword(3) | MBE growth |
1st Author's Name | Kenichi Kawaguchi |
1st Author's Affiliation | Superconductivity Research Laboratory,ISTEC() |
2nd Author's Name | Govind Pindoria |
2nd Author's Affiliation | Superconductivity Research Laboratory,ISTEC |
3rd Author's Name | Ryusuke Kita |
3rd Author's Affiliation | Superconductivity Research Laboratory,ISTEC |
4th Author's Name | Madoka Nishiyama |
4th Author's Affiliation | Superconductivity Research Laboratory,ISTEC |
5th Author's Name | Tadataka Morishita |
5th Author's Affiliation | Superconductivity Research Laboratory,ISTEC |
Date | 1994/2/16 |
Paper # | SCE93-57,CPM93-111 |
Volume (vol) | vol.93 |
Number (no) | 461 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |