Presentation 2004/10/15
High-quality III-VN alloys (GaInNAs,GaInNP) on Al containing layers grown by MOCVD
Takashi TAKAHASHI, Shunichi SATO, Naoto JIKUTANI, Morimasa KAMINISHI, Kei HARA, Shiro SATOH,
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Abstract(in English) The mixed group-V nitride alloy semiconductor (III-VN alloy) is attractive novel material for long wavelength laser, solar cell, and HBT. We have studied the cause of crystalline quality degradation of the III-VN alloys such as GaInNAs and GaInNP grown on the Al containing layer by metalorganic chemical vapor deposition (MOCVD). Directly grown III-VN alloy on Al containing layer shows rough surface morphology and low photoluminescence intensity in the cause of nitrogen pile up at the interface. Al contamination into the III-VN alloy was detected and the oxygen incorporated the III-VN alloy by reacting with the Al caused the degradation of the emission efficiency. By optimizing the device structure and growth conditions, the lowest threshold current density per well (120A/cm^2/well) for 1.3 μm range GaInNAs laser was demonstrated at the GaInNAs triple quantum well (TQW) lasers on AlGaAs cladding layer. It was indicated that high-quality III-VN alloy growth on Al containing layer was enable by MOCVD.
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Keyword(in English) MOCVD / III-VN alloy / GaInNAs / GalnNP
Paper # ED2004-141,CPM2004-115,LQE2004-79
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Committee LQE
Conference Date 2004/10/15(1days)
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Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) High-quality III-VN alloys (GaInNAs,GaInNP) on Al containing layers grown by MOCVD
Sub Title (in English)
Keyword(1) MOCVD
Keyword(2) III-VN alloy
Keyword(3) GaInNAs
Keyword(4) GalnNP
1st Author's Name Takashi TAKAHASHI
1st Author's Affiliation Research and Development Center, Research & Development Group, Ricoh Company Ltd.()
2nd Author's Name Shunichi SATO
2nd Author's Affiliation Research and Development Center, Research & Development Group, Ricoh Company Ltd.
3rd Author's Name Naoto JIKUTANI
3rd Author's Affiliation Research and Development Center, Research & Development Group, Ricoh Company Ltd.
4th Author's Name Morimasa KAMINISHI
4th Author's Affiliation Research and Development Center, Research & Development Group, Ricoh Company Ltd.
5th Author's Name Kei HARA
5th Author's Affiliation Research and Development Center, Research & Development Group, Ricoh Company Ltd.
6th Author's Name Shiro SATOH
6th Author's Affiliation Research and Development Center, Research & Development Group, Ricoh Company Ltd.
Date 2004/10/15
Paper # ED2004-141,CPM2004-115,LQE2004-79
Volume (vol) vol.104
Number (no) 362
Page pp.pp.-
#Pages 6
Date of Issue