Presentation | 2004/10/14 Al-Free n-Type Ohmic Contact for AlGaN/GaN Power HEMTs Toshihiro OHKI, Masahito KANAMURA, Tsuyoshi TAKAHASHI, Toshihide KIKKAWA, Kazukiyo JOSHIN, Naoki HARA, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We have demonstrated an Al-free Ti/Mo/Ta/Au-based n-type ohmic contact for high power AlGaN/GaN high electron mobility transistors (HEMTs). Our fabricated ohmic contact has an extremely smooth surface morphology and almost the same specific contact resistance (p_c) of 9.1 × 10^<-6> Ωcm^2 as conventional Ti/Al-based contacts. We have found that Mo, which is generally inserted as a barrier layer, has the effect of reducing contact resistance. Moreover, we have applied this ohmic technique to fabricate an AlGaN/GaN HEMT and obtained sufficient transconductance (g_m) of 210 mS/mm. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | GaN / AlGaN / HEMT / FET / ohmic |
Paper # | ED2004-132,CPM2004-106,LQE2004-70 |
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Conference Information | |
Committee | LQE |
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Conference Date | 2004/10/14(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
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Paper Information | |
Registration To | Lasers and Quantum Electronics (LQE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Al-Free n-Type Ohmic Contact for AlGaN/GaN Power HEMTs |
Sub Title (in English) | |
Keyword(1) | GaN |
Keyword(2) | AlGaN |
Keyword(3) | HEMT |
Keyword(4) | FET |
Keyword(5) | ohmic |
1st Author's Name | Toshihiro OHKI |
1st Author's Affiliation | Fujitsu Laboratories Ltd.() |
2nd Author's Name | Masahito KANAMURA |
2nd Author's Affiliation | Fujitsu Laboratories Ltd. |
3rd Author's Name | Tsuyoshi TAKAHASHI |
3rd Author's Affiliation | Fujitsu Laboratories Ltd. |
4th Author's Name | Toshihide KIKKAWA |
4th Author's Affiliation | Fujitsu Laboratories Ltd. |
5th Author's Name | Kazukiyo JOSHIN |
5th Author's Affiliation | Fujitsu Laboratories Ltd. |
6th Author's Name | Naoki HARA |
6th Author's Affiliation | Fujitsu Laboratories Ltd. |
Date | 2004/10/14 |
Paper # | ED2004-132,CPM2004-106,LQE2004-70 |
Volume (vol) | vol.104 |
Number (no) | 361 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |