Presentation 2004/10/14
Observation of InN dots on N-polar GaN grown by RF-MBE : Investigation of growth mechanism of N-polar InN dots growth
Naoki HASHIMOTO, Naohiro KIKUKAWA, Song-Bek CHE, Yoshihiro ISHITANI, Akihiko YOSHIKAWA,
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Abstract(in English) We grew InN dots on N-polar GaN by RF-MBE, and investigated their growth mechanism. From RHEED analysis of InN growth, we found that lattice relaxation of InN layer, which was grown under N-rich condition, occurred at almost 1ML. AFM image after 1.74ML growth of InN showed uniformly formation of InN dots. Moreover diameter, height and density of them were estimated to be 12-18nm (average: 15.8nm), 0.3-1.6nm (average: 1.00nm) and 3.8×10^<11>cm^<-2>, respectively. Height of InN dots increased with InN layer thickness, but diameter of them didn't increase until coalescence of InN dots occurred. The size of InN dot became big under higher growth temperature because of enhancement of surface migration.
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Keyword(in English) Indium nitride / Quantum dot / RF-MBE / RHEED / AFM
Paper # ED2004-131,CPM2004-105,LQE2004-69
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Committee LQE
Conference Date 2004/10/14(1days)
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Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Observation of InN dots on N-polar GaN grown by RF-MBE : Investigation of growth mechanism of N-polar InN dots growth
Sub Title (in English)
Keyword(1) Indium nitride
Keyword(2) Quantum dot
Keyword(3) RF-MBE
Keyword(4) RHEED
Keyword(5) AFM
1st Author's Name Naoki HASHIMOTO
1st Author's Affiliation Department of Engineering, Chiba University:InN-Project as CREST-program of JST, Chiba University()
2nd Author's Name Naohiro KIKUKAWA
2nd Author's Affiliation Department of Engineering, Chiba University
3rd Author's Name Song-Bek CHE
3rd Author's Affiliation Department of Engineering, Chiba University:VBL, Chiba University:InN-Project as CREST-program of JST, Chiba University
4th Author's Name Yoshihiro ISHITANI
4th Author's Affiliation Department of Engineering, Chiba University:VBL, Chiba University:InN-Project as CREST-program of JST, Chiba University
5th Author's Name Akihiko YOSHIKAWA
5th Author's Affiliation Department of Engineering, Chiba University:VBL, Chiba University:InN-Project as CREST-program of JST, Chiba University
Date 2004/10/14
Paper # ED2004-131,CPM2004-105,LQE2004-69
Volume (vol) vol.104
Number (no) 361
Page pp.pp.-
#Pages 5
Date of Issue