| Presentation | 2004/10/14 Surface Stoichiometry Control of InN Grown by RF-MBE Using In-situ Spectroscopic Ellipsometry Masayoshi YOSHITANI, Koichiro AKASAKA, Song-Bek CHE, Xinqiang WANG, Yoshihiro ISHITANI, Akihiko YOSHIKAWA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In order to obtain a high quality InN film, higher temperature growth is preferable with considering decomposition temperature of InN, which is estimated to be about 600℃. Under this condition, a V/III ratio during the InN growth should be precisely controlled to keep the Stoichiometry condition. In this study, we investigated surface states of InN epitaxial layers by using the in-situ Spectroscopic ellipsometry (SE). Pseudo-dielectric function <ε> strongly depended on surface states and V/III ratios. This real time SE monitoring was very useful to control the surface state and to obtain high quality and thick (over 5 μm) InN crystals. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | InN / Spectroscopic ellipsometry / Surface Stoichiometry / RF-MBE |
| Paper # | ED2004-129,CPM2004-103,LQE2004-67 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2004/10/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Surface Stoichiometry Control of InN Grown by RF-MBE Using In-situ Spectroscopic Ellipsometry |
| Sub Title (in English) | |
| Keyword(1) | InN |
| Keyword(2) | Spectroscopic ellipsometry |
| Keyword(3) | Surface Stoichiometry |
| Keyword(4) | RF-MBE |
| 1st Author's Name | Masayoshi YOSHITANI |
| 1st Author's Affiliation | Department of Electronics and Mechanical Engineering, Chiba University() |
| 2nd Author's Name | Koichiro AKASAKA |
| 2nd Author's Affiliation | Department of Electronics and Mechanical Engineering, Chiba University |
| 3rd Author's Name | Song-Bek CHE |
| 3rd Author's Affiliation | Department of Electronics and Mechanical Engineering, Chiba University:Chiba University-VBL:InN-Project as a CREST program of JST, Chiba University |
| 4th Author's Name | Xinqiang WANG |
| 4th Author's Affiliation | Chiba University-VBL:InN-Project as a CREST program of JST, Chiba University |
| 5th Author's Name | Yoshihiro ISHITANI |
| 5th Author's Affiliation | Department of Electronics and Mechanical Engineering, Chiba University:Chiba University-VBL:InN-Project as a CREST program of JST, Chiba University |
| 6th Author's Name | Akihiko YOSHIKAWA |
| 6th Author's Affiliation | Department of Electronics and Mechanical Engineering, Chiba University:Chiba University-VBL:InN-Project as a CREST program of JST, Chiba University |
| Date | 2004/10/14 |
| Paper # | ED2004-129,CPM2004-103,LQE2004-67 |
| Volume (vol) | vol.104 |
| Number (no) | 361 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |