Presentation | 2004/10/14 Study on InGaN ultra-thin films by high-resolution Rutherford backscattering spectrometry Satoshi KURAI, Hiroaki SAKUTA, Yoshitomo YAMANAKA, Tsunemasa TAGUCHI, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Thermal diffusion of In atoms in InGaN ultra-thin films of the thickness of 3 nm, which were grown by RF-MBE, was directly observed by the high-resolution Rutherford backscattering spectrometry. As the result, InGaN ultra-thin films decomposed by post-growth thermal annealing at 875℃ for lOmin, but remained by covering with GaN capping layers. However the decomposition of InGaN was suppressed by the capping layer, the thickness of InGaN with post-growth thermal annealing increased comparing with that before annealing; On the contrary, the thickness of the cap-GaN layer decreased. This result indicates that diffusion of In atoms occurred at GaN/InGaN interface. The diffusion coefficient was estimated to be approximately 3.8 × 10^<18> cm^2/s. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | high-resolution Rutherford backscattering spectrometry / RF-MBE / InGaN / thermal diffusion / diffusion coefficient |
Paper # | ED2004-126,CPM2004-100,LQE2004-64 |
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Conference Information | |
Committee | LQE |
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Conference Date | 2004/10/14(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Lasers and Quantum Electronics (LQE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Study on InGaN ultra-thin films by high-resolution Rutherford backscattering spectrometry |
Sub Title (in English) | |
Keyword(1) | high-resolution Rutherford backscattering spectrometry |
Keyword(2) | RF-MBE |
Keyword(3) | InGaN |
Keyword(4) | thermal diffusion |
Keyword(5) | diffusion coefficient |
1st Author's Name | Satoshi KURAI |
1st Author's Affiliation | Faculty of Engineering, Yamaguchi University() |
2nd Author's Name | Hiroaki SAKUTA |
2nd Author's Affiliation | Faculty of Engineering, Yamaguchi University |
3rd Author's Name | Yoshitomo YAMANAKA |
3rd Author's Affiliation | Faculty of Engineering, Yamaguchi University |
4th Author's Name | Tsunemasa TAGUCHI |
4th Author's Affiliation | Faculty of Engineering, Yamaguchi University |
Date | 2004/10/14 |
Paper # | ED2004-126,CPM2004-100,LQE2004-64 |
Volume (vol) | vol.104 |
Number (no) | 361 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |