| Presentation | 2004/10/14 Evaluation of deep levels in AlGaN on sapphire by Capacitance DLTS Jiro OSAKA, Masato NISHIURA, Toru OKINO, Yutaka OHNO, Shigeru KISHIMOTO, Kouichi MAEZAWA, Takashi MIZUTANI, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | GaN-related compound semiconductors are expected to be used for future high-performance electron devices, and much studies of the effects of crystal quality on device characteristics are now on progress. However, there is no report on the deep levels, which is an indicator of crystal quality, of AlGaN which is indispensable to form hetero-structures. In this paper, we studied deep levels in HVPE-grown AlxGal-xN (; x =0.09 and 0.17) by using capacitance-DLTS method, for the first time to our knowledge. We found that there are three typical deep levels in AlGaN and that their characteristics depend on the Al content. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | AlGaN / DLTS / Deep Level / HVPE / Schottki Diode |
| Paper # | ED2004-125,CPM2004-99,LQE2004-63 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2004/10/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Evaluation of deep levels in AlGaN on sapphire by Capacitance DLTS |
| Sub Title (in English) | |
| Keyword(1) | AlGaN |
| Keyword(2) | DLTS |
| Keyword(3) | Deep Level |
| Keyword(4) | HVPE |
| Keyword(5) | Schottki Diode |
| 1st Author's Name | Jiro OSAKA |
| 1st Author's Affiliation | School of Engineering, Nagoya University() |
| 2nd Author's Name | Masato NISHIURA |
| 2nd Author's Affiliation | School of Engineering, Nagoya University |
| 3rd Author's Name | Toru OKINO |
| 3rd Author's Affiliation | School of Engineering, Nagoya University |
| 4th Author's Name | Yutaka OHNO |
| 4th Author's Affiliation | School of Engineering, Nagoya University |
| 5th Author's Name | Shigeru KISHIMOTO |
| 5th Author's Affiliation | School of Engineering, Nagoya University |
| 6th Author's Name | Kouichi MAEZAWA |
| 6th Author's Affiliation | School of Engineering, Nagoya University |
| 7th Author's Name | Takashi MIZUTANI |
| 7th Author's Affiliation | School of Engineering, Nagoya University |
| Date | 2004/10/14 |
| Paper # | ED2004-125,CPM2004-99,LQE2004-63 |
| Volume (vol) | vol.104 |
| Number (no) | 361 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |