Presentation 2004/10/14
The Effect of Growth Pressure on material properties of p-type GaN
Akinori Ubukata, Hiroki Tokunaga, Yoshiki Yano, Nakao Akutsu, Koh Matsumoto, Toshiaki Yamazaki,
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Abstract(in English) We investigated the effect of growth pressure on material properties of Mg-doped GaN. We found that the hole carrier concentration of p-type GaN grown at 300 Torr was more than one order of magnitude lower than that of p-type GaN grown at atmospheric pressure. In cross-sectional TEM observation, pyramidal defects were observed periodically. These defects were supposed to be inversion domains boundary defects. In this area, strong donor-acceptor emission peaks were observed in CL spectra. It indicates that the donor-like point defects were also generated, associated with IDB. These results may correspond to the electrical properties of p-GaN grown with different growth pressure.
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Keyword(in English) Mg doping / point defect / inversion domain / MOVPE / atmospheric pressure growth
Paper # ED2004-122,CPM2004-96,LQE2004-60
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Committee LQE
Conference Date 2004/10/14(1days)
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Registration To Lasers and Quantum Electronics (LQE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) The Effect of Growth Pressure on material properties of p-type GaN
Sub Title (in English)
Keyword(1) Mg doping
Keyword(2) point defect
Keyword(3) inversion domain
Keyword(4) MOVPE
Keyword(5) atmospheric pressure growth
1st Author's Name Akinori Ubukata
1st Author's Affiliation Compound Semiconductor Project, NIPPON SANSO Corporation()
2nd Author's Name Hiroki Tokunaga
2nd Author's Affiliation Compound Semiconductor Project, NIPPON SANSO Corporation
3rd Author's Name Yoshiki Yano
3rd Author's Affiliation Compound Semiconductor Project, NIPPON SANSO Corporation
4th Author's Name Nakao Akutsu
4th Author's Affiliation Compound Semiconductor Project, NIPPON SANSO Corporation
5th Author's Name Koh Matsumoto
5th Author's Affiliation Compound Semiconductor Project, NIPPON SANSO Corporation
6th Author's Name Toshiaki Yamazaki
6th Author's Affiliation Compound Semiconductor Project, NIPPON SANSO Corporation
Date 2004/10/14
Paper # ED2004-122,CPM2004-96,LQE2004-60
Volume (vol) vol.104
Number (no) 361
Page pp.pp.-
#Pages 4
Date of Issue