| Presentation | 2004/10/14 Hydride Vapor Phase Epitaxy of Al-Containing Nitrides with High Growth Rate : Is It Possible to Grow AlN by Hydride Vapor Phase Epitaxy? Yoshinao KUMAGAI, Akinori KOUKITU, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In order to achieve hydride vapor phase epitaxy (HVPE) of AlN, a thermodynamic analysis and a preliminary experiment targeting preferential generation of AlCl_3, which does not react with quartz (SiO_2) reactor, by the reaction between Al metal and HCl gas at the Al source zone were performed. Regardless of the H_2 mole fraction in the carrier gas, preferential generation of AlCl_3 is possible by maintaining the source zone at approximately 500℃. Based on this finding, AlN was grown on sapphire substrates at 1100℃ using AlCl_3 and NH_3. The growth rate reached 122 μm/h at AlCl_3 input partial pressure of 2.0×10^<-3> atm and input V/III ratio of 2. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | AlN / HVPE / AlCl_3 / Quartz Reactor / Thermodynamic Analysis / High Growth Rate |
| Paper # | ED2004-121,CPM2004-95,LQE2004-59 |
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| Conference Information | |
| Committee | LQE |
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| Conference Date | 2004/10/14(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Lasers and Quantum Electronics (LQE) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Hydride Vapor Phase Epitaxy of Al-Containing Nitrides with High Growth Rate : Is It Possible to Grow AlN by Hydride Vapor Phase Epitaxy? |
| Sub Title (in English) | |
| Keyword(1) | AlN |
| Keyword(2) | HVPE |
| Keyword(3) | AlCl_3 |
| Keyword(4) | Quartz Reactor |
| Keyword(5) | Thermodynamic Analysis |
| Keyword(6) | High Growth Rate |
| 1st Author's Name | Yoshinao KUMAGAI |
| 1st Author's Affiliation | Department of Applied Chemistry, Tokyo University of Agriculture and Technology() |
| 2nd Author's Name | Akinori KOUKITU |
| 2nd Author's Affiliation | Department of Applied Chemistry, Tokyo University of Agriculture and Technology |
| Date | 2004/10/14 |
| Paper # | ED2004-121,CPM2004-95,LQE2004-59 |
| Volume (vol) | vol.104 |
| Number (no) | 361 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |