Presentation | 2004/10/14 Amorphous GaN Films Deposited on Al substrates by CS-MBE at Low Temperature S. EGAWA, T. HONDA, H. HASEGAWA, H. KAWANISHI, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Compound source molecular beam Epitaxy (CS-MBE) is one of the techniques to achieve a low-temperature deposition of amorphous GaN (a-GaN) films. Amorphous GaN Films are deposited on Al substrates by CS-MBE and are applied to GaN-based electroluminescent devices (ELDs) operating in UV/blue spectral regions. The Al substrates have a high thermal conductivity, which leads to the long-lifetime operation of GaN-based ELDs. The ELDs fabricated on Al substrates show a longer lifetime than that of the ELDs on glass substrates. It is due to a good thermal conductivity of Al substrates compared with Glass substrates. The introduction of a buffer layer deposited at RT improves the surface smoothness of a-GaN films. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | GaN / Amorphous / Low-temperature deposition / MBE |
Paper # | ED2004-119,CPM2004-93,LQE2004-57 |
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Conference Information | |
Committee | LQE |
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Conference Date | 2004/10/14(1days) |
Place (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Lasers and Quantum Electronics (LQE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Amorphous GaN Films Deposited on Al substrates by CS-MBE at Low Temperature |
Sub Title (in English) | |
Keyword(1) | GaN |
Keyword(2) | Amorphous |
Keyword(3) | Low-temperature deposition |
Keyword(4) | MBE |
1st Author's Name | S. EGAWA |
1st Author's Affiliation | Dept. of Electronic Engineering, Kogakuin University() |
2nd Author's Name | T. HONDA |
2nd Author's Affiliation | Dept. of Electronic Engineering, Kogakuin University |
3rd Author's Name | H. HASEGAWA |
3rd Author's Affiliation | Dept. of Electronic Engineering, Kogakuin University |
4th Author's Name | H. KAWANISHI |
4th Author's Affiliation | Dept. of Electronic Engineering, Kogakuin University |
Date | 2004/10/14 |
Paper # | ED2004-119,CPM2004-93,LQE2004-57 |
Volume (vol) | vol.104 |
Number (no) | 361 |
Page | pp.pp.- |
#Pages | 4 |
Date of Issue |