Presentation | 2004/10/14 Growth of GaN on 4H-SiC with different crystal planes Yasuto MIYAKE, Akira HONSHIO, Tsukasa KITANO, Masataka IMURA, Kiyotaka NAKANO, Hideki KASUGAI, Takeshi KAWASHIMA, Kazuyoshi IIDA, Motoaki IWAYA, Satoshi KAMIYAMA, Hiroshi AMANO, Isamu AKASAKI, Hiroyuki KINOSHITA, Hiromu SHIOMI, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | MOVPE growth of GaN and AlGaN on 4H-SiC having different planes were conducted. X-ray diffraction measurements showed that the GaN axis is exactly aligned with that of the SiC substrates. Strong dependence was observed for the FWHMs of X-ray rocking curves of GaN (0002) and (112^-0) diffraction on the tilting of the crystal planes. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | c axis inclination / GaN / XRD / AlGaN |
Paper # | ED2004-117,CPM2004-91,LQE2004-55 |
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Conference Information | |
Committee | LQE |
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Conference Date | 2004/10/14(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Lasers and Quantum Electronics (LQE) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Growth of GaN on 4H-SiC with different crystal planes |
Sub Title (in English) | |
Keyword(1) | c axis inclination |
Keyword(2) | GaN |
Keyword(3) | XRD |
Keyword(4) | AlGaN |
1st Author's Name | Yasuto MIYAKE |
1st Author's Affiliation | Faculty of Science and Technology, 2 1 st Century COE "Nano-Factory", Meijo University() |
2nd Author's Name | Akira HONSHIO |
2nd Author's Affiliation | Faculty of Science and Technology, 2 1 st Century COE "Nano-Factory", Meijo University |
3rd Author's Name | Tsukasa KITANO |
3rd Author's Affiliation | Faculty of Science and Technology, 2 1 st Century COE "Nano-Factory", Meijo University |
4th Author's Name | Masataka IMURA |
4th Author's Affiliation | Faculty of Science and Technology, 2 1 st Century COE "Nano-Factory", Meijo University |
5th Author's Name | Kiyotaka NAKANO |
5th Author's Affiliation | Faculty of Science and Technology, 2 1 st Century COE "Nano-Factory", Meijo University |
6th Author's Name | Hideki KASUGAI |
6th Author's Affiliation | Faculty of Science and Technology, 2 1 st Century COE "Nano-Factory", Meijo University |
7th Author's Name | Takeshi KAWASHIMA |
7th Author's Affiliation | Faculty of Science and Technology, 2 1 st Century COE "Nano-Factory", Meijo University |
8th Author's Name | Kazuyoshi IIDA |
8th Author's Affiliation | Faculty of Science and Technology, 2 1 st Century COE "Nano-Factory", Meijo University |
9th Author's Name | Motoaki IWAYA |
9th Author's Affiliation | Faculty of Science and Technology, 2 1 st Century COE "Nano-Factory", Meijo University |
10th Author's Name | Satoshi KAMIYAMA |
10th Author's Affiliation | Faculty of Science and Technology, 2 1 st Century COE "Nano-Factory", Meijo University |
11th Author's Name | Hiroshi AMANO |
11th Author's Affiliation | Faculty of Science and Technology, 2 1 st Century COE "Nano-Factory", Meijo University |
12th Author's Name | Isamu AKASAKI |
12th Author's Affiliation | Faculty of Science and Technology, 2 1 st Century COE "Nano-Factory", Meijo University |
13th Author's Name | Hiroyuki KINOSHITA |
13th Author's Affiliation | SiXON Limited |
14th Author's Name | Hiromu SHIOMI |
14th Author's Affiliation | SiXON Limited |
Date | 2004/10/14 |
Paper # | ED2004-117,CPM2004-91,LQE2004-55 |
Volume (vol) | vol.104 |
Number (no) | 361 |
Page | pp.pp.- |
#Pages | 5 |
Date of Issue |