Presentation 2004/10/1
Fabrication of optical waveguide structure by fs-laser lithography
Shinya SHIBATA, Okihiro SUGIHARA, Toshikuni KAINO, Haridas E. Pudavar, James O'Rielly, Paras N. Prasad,
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Abstract(in English) fs-laser lithography has various advantages such as high resolution and three-dimensional structure hi a transparent material by two- or multi-photon absorption reaction. In this work, we considered about the fabrication of rating structures, controlling of two photon reaction area and formation of optical waveguide structure in polymer films. Four kinds of two-photon dye and two kinds of UV curable acrylate type monomer, Desobond 105 and 9D9-464 were used. The polymerized grating structures were observed in every dye with a variety of concentration (2.5~0.25wt%). The dye doped PMMA thick film was formed, and a cross-sectional fluorescence change was observed by confocal microscope. The fluorescence took an ellipsoidal form, but the symmetrical structure could be fabricated by giving the suitable line interval and the number of times. And then, the 4.8x4.3um2 size straight-line structure was fabricated and by confirming the near field pattern of the coupled light (1300nm) from the cross section, an optical waveguide was obtained.
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Keyword(in English) fs-laser / two photon absorption / Laser Lithography / Optical Waveguide
Paper # OME2004-83,OPE2004-146
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Committee OPE
Conference Date 2004/10/1(1days)
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Registration To Optoelectronics (OPE)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication of optical waveguide structure by fs-laser lithography
Sub Title (in English)
Keyword(1) fs-laser
Keyword(2) two photon absorption
Keyword(3) Laser Lithography
Keyword(4) Optical Waveguide
1st Author's Name Shinya SHIBATA
1st Author's Affiliation Institute of Multidisciplinary Research for Advanced Materials, Tohoku University()
2nd Author's Name Okihiro SUGIHARA
2nd Author's Affiliation Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
3rd Author's Name Toshikuni KAINO
3rd Author's Affiliation Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
4th Author's Name Haridas E. Pudavar
4th Author's Affiliation Institute for Lasers, Photonics & BioPhotonics, State University of New York at Buffalo
5th Author's Name James O'Rielly
5th Author's Affiliation Institute for Lasers, Photonics & BioPhotonics, State University of New York at Buffalo
6th Author's Name Paras N. Prasad
6th Author's Affiliation Institute for Lasers, Photonics & BioPhotonics, State University of New York at Buffalo
Date 2004/10/1
Paper # OME2004-83,OPE2004-146
Volume (vol) vol.104
Number (no) 333
Page pp.pp.-
#Pages 6
Date of Issue