Presentation 2004/11/12
Piezoelectric Materials and Elastic Wave Devices
Takehiko UNO,
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Abstract(in English) Elastic waves in solid are widely utilized for frequency control devices such as oscillators, filters in high frequency regions and signal processing devices. In the frequency control devices, piezoelectricity is used to couple between electric signal and ultrasonic wave. By using the piezoelectricity, compact and high stable devices are possible to realize. In this paper, some examples of elastic wave devices using piezoelectricity are described. Because there are many papers and books about the piezoelectric devices, I focus attention on some special examples of devices by LiTaO_3 and quartz. Furthermore, a new trial to fabricate single crystal thin film on glass substrate is described.
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Keyword(in English) elastic wave devices / piezoelectric material / lithium tantalite / quartz / crystal thin film
Paper # EMD2004-86
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Committee EMD
Conference Date 2004/11/12(1days)
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Registration To Electromechanical Devices (EMD)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Piezoelectric Materials and Elastic Wave Devices
Sub Title (in English)
Keyword(1) elastic wave devices
Keyword(2) piezoelectric material
Keyword(3) lithium tantalite
Keyword(4) quartz
Keyword(5) crystal thin film
1st Author's Name Takehiko UNO
1st Author's Affiliation Department of Electronic and Electronics Eng., Kanagawa Institute of Techonology()
Date 2004/11/12
Paper # EMD2004-86
Volume (vol) vol.104
Number (no) 451
Page pp.pp.-
#Pages 8
Date of Issue