| Presentation | 2002/2/8 Fabrication of Micro-probes Using X-ray Lithography and Their Endurance Test Seichin KINUTA, Yoshiyuki ICHINOSAWA, Hirohiko SUGAHARA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Combination of X-ray lithography, called LIGA process, and electroforming technology allows fabrication of ultra-fine, high-precision three-dimensional metal components. In this study, micro-probes for IC testing have been fabricated with the LIGA/electroforming. The probe shape is optimized with finite-element analysis. A fatigue-evaluator is built to test the fatigue resistance of the micro-probes made with this technology. The fabrication process and fatigue testing are discussed in this paper. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | X-ray Lithograph / Electroforming / LIGA / Probe / Endurance Test / Micromachine |
| Paper # | R2001-43 EMD2001-100 |
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| Conference Information | |
| Committee | EMD |
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| Conference Date | 2002/2/8(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Electromechanical Devices (EMD) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of Micro-probes Using X-ray Lithography and Their Endurance Test |
| Sub Title (in English) | |
| Keyword(1) | X-ray Lithograph |
| Keyword(2) | Electroforming |
| Keyword(3) | LIGA |
| Keyword(4) | Probe |
| Keyword(5) | Endurance Test |
| Keyword(6) | Micromachine |
| 1st Author's Name | Seichin KINUTA |
| 1st Author's Affiliation | Optnics Precision Co.,LTD.() |
| 2nd Author's Name | Yoshiyuki ICHINOSAWA |
| 2nd Author's Affiliation | Optnics Precision Co.,LTD. |
| 3rd Author's Name | Hirohiko SUGAHARA |
| 3rd Author's Affiliation | NTT Photonics Laboratories,NTT Corporation |
| Date | 2002/2/8 |
| Paper # | R2001-43 EMD2001-100 |
| Volume (vol) | vol.101 |
| Number (no) | 642 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |