| Presentation | 2005/1/21 Conduction control of ZnMgO thin film on Si substrates by laser doping Kenji OHARA, Takashi HARAKAWA, Toshiaki SEINO, Atushi NAKAMURA, Toru AOKI, Hiroko KOMINAMI, Yoichiro NAKANISHI, Yoshinori HATANAKA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | ZnMgO films was prepared by oxidization of ZnMgS films deposited on Si substrates by electron beam evaporation. ZnMgO : Al was prepared by laser doping of oxidized ZnMgO films. Laser irradiation energy density was changed in this experiment. As a result, Crystallinity and the luminescence properties have been improved by irradiation energy density of 110mJ/cm^2 or less. However, it was indicated that the film suffers the damage by the irradiation of high energy density up to 130mJ/cm^2. On the other hand, it was toward that the resistively decreased with increase of irradiation energy density. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ZnO / ZnMgO / laser doping |
| Paper # | EID2004-53 |
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| Conference Information | |
| Committee | EID |
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| Conference Date | 2005/1/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Paper Information | |
| Registration To | Electronic Information Displays (EID) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Conduction control of ZnMgO thin film on Si substrates by laser doping |
| Sub Title (in English) | |
| Keyword(1) | ZnO |
| Keyword(2) | ZnMgO |
| Keyword(3) | laser doping |
| 1st Author's Name | Kenji OHARA |
| 1st Author's Affiliation | Res. Inst. of Electron, Shizuoka, University() |
| 2nd Author's Name | Takashi HARAKAWA |
| 2nd Author's Affiliation | Res. Inst. of Electron, Shizuoka, University |
| 3rd Author's Name | Toshiaki SEINO |
| 3rd Author's Affiliation | Japan Steel Works, LTD |
| 4th Author's Name | Atushi NAKAMURA |
| 4th Author's Affiliation | Graduate School of Electron. Sci. and Technol., Shizuoka University |
| 5th Author's Name | Toru AOKI |
| 5th Author's Affiliation | Res. Inst. of Electron, Shizuoka, University |
| 6th Author's Name | Hiroko KOMINAMI |
| 6th Author's Affiliation | Res. Inst. of Electron, Shizuoka, University |
| 7th Author's Name | Yoichiro NAKANISHI |
| 7th Author's Affiliation | Res. Inst. of Electron, Shizuoka, University |
| 8th Author's Name | Yoshinori HATANAKA |
| 8th Author's Affiliation | Aichi University of Technology |
| Date | 2005/1/21 |
| Paper # | EID2004-53 |
| Volume (vol) | vol.104 |
| Number (no) | 621 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |