| Presentation | 2005/6/17 Study on High Frequency SAW Device Fabricated on Epitaxitially grown GaN Manabu YOKOTA, Masaya WADA, Chinami KANESHIRO, Kazumi NISHIMURA, Naoteru SHIGEKAWA, Kohji HOHKAWA, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In this paper, we study on high frequency SAW device fabricated on GaN epitaxitial layer. We carried out basic experiments of frequency characteristics and dispersion characteristics using test device. We observed acoustic waves which differ from SAW and propagate in GaN layer with guide mode. The experimental results shows that the waves of layer guide mode are dependence on crystalline of GaN layer and the relation between SAW wave length and thickness of GaN layer. It is indicated that the high frequency device using layer mode are realized by design of parameters, such as IDT, layer thickness, and so on. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | GaN / High frequency acoustic device / MOCVD |
| Paper # | EMD2005-18,CPM2005-57,OME2005-32 |
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| Conference Information | |
| Committee | OME |
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| Conference Date | 2005/6/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Organic Material Electronics (OME) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Study on High Frequency SAW Device Fabricated on Epitaxitially grown GaN |
| Sub Title (in English) | |
| Keyword(1) | GaN |
| Keyword(2) | High frequency acoustic device |
| Keyword(3) | MOCVD |
| 1st Author's Name | Manabu YOKOTA |
| 1st Author's Affiliation | Faculty of Engineering, Kanagawa Institute of Technology() |
| 2nd Author's Name | Masaya WADA |
| 2nd Author's Affiliation | Faculty of Engineering, Kanagawa Institute of Technology |
| 3rd Author's Name | Chinami KANESHIRO |
| 3rd Author's Affiliation | Faculty of Engineering, Kanagawa Institute of Technology |
| 4th Author's Name | Kazumi NISHIMURA |
| 4th Author's Affiliation | NTT Photonics Laboratories |
| 5th Author's Name | Naoteru SHIGEKAWA |
| 5th Author's Affiliation | NTT Photonics Laboratories |
| 6th Author's Name | Kohji HOHKAWA |
| 6th Author's Affiliation | Faculty of Engineering, Kanagawa Institute of Technology |
| Date | 2005/6/17 |
| Paper # | EMD2005-18,CPM2005-57,OME2005-32 |
| Volume (vol) | vol.105 |
| Number (no) | 141 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |